JPS55117949A - Auger electron spectroscopic analysis method - Google Patents

Auger electron spectroscopic analysis method

Info

Publication number
JPS55117949A
JPS55117949A JP2561479A JP2561479A JPS55117949A JP S55117949 A JPS55117949 A JP S55117949A JP 2561479 A JP2561479 A JP 2561479A JP 2561479 A JP2561479 A JP 2561479A JP S55117949 A JPS55117949 A JP S55117949A
Authority
JP
Japan
Prior art keywords
sample
spectroscopic analysis
electron beam
analysis method
auger electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2561479A
Other languages
Japanese (ja)
Inventor
Michiko Kurano
Takashi Furusawa
Hiroko Otomo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2561479A priority Critical patent/JPS55117949A/en
Publication of JPS55117949A publication Critical patent/JPS55117949A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To obtain an Auger spectrum reflecting intrinsic components of a sample by moving slightly the measured sample in a plane vertical to the irradiation electron beam. CONSTITUTION:By the mechansim (for example, a manipulator) which sets a sample, which is provided in an Auger electron spectroscopic analysis unit, to a prescribed position, the sample is moved slightly to shift the irradiation point of irradiated electrons in measurement. The speed where the measured sample is moved slightly is dependent upon energy of irradiated electrons (irradiated electron beam current), the electron beam diameter, and the material of the sample, and is 0.5-2mm/min, desirably.
JP2561479A 1979-03-07 1979-03-07 Auger electron spectroscopic analysis method Pending JPS55117949A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2561479A JPS55117949A (en) 1979-03-07 1979-03-07 Auger electron spectroscopic analysis method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2561479A JPS55117949A (en) 1979-03-07 1979-03-07 Auger electron spectroscopic analysis method

Publications (1)

Publication Number Publication Date
JPS55117949A true JPS55117949A (en) 1980-09-10

Family

ID=12170756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2561479A Pending JPS55117949A (en) 1979-03-07 1979-03-07 Auger electron spectroscopic analysis method

Country Status (1)

Country Link
JP (1) JPS55117949A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8732913B2 (en) 2006-03-13 2014-05-27 C.I. Kasei Company, Limited Fastener and bag having fastener

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8732913B2 (en) 2006-03-13 2014-05-27 C.I. Kasei Company, Limited Fastener and bag having fastener

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