JPS55117949A - Auger electron spectroscopic analysis method - Google Patents
Auger electron spectroscopic analysis methodInfo
- Publication number
- JPS55117949A JPS55117949A JP2561479A JP2561479A JPS55117949A JP S55117949 A JPS55117949 A JP S55117949A JP 2561479 A JP2561479 A JP 2561479A JP 2561479 A JP2561479 A JP 2561479A JP S55117949 A JPS55117949 A JP S55117949A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- spectroscopic analysis
- electron beam
- analysis method
- auger electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE:To obtain an Auger spectrum reflecting intrinsic components of a sample by moving slightly the measured sample in a plane vertical to the irradiation electron beam. CONSTITUTION:By the mechansim (for example, a manipulator) which sets a sample, which is provided in an Auger electron spectroscopic analysis unit, to a prescribed position, the sample is moved slightly to shift the irradiation point of irradiated electrons in measurement. The speed where the measured sample is moved slightly is dependent upon energy of irradiated electrons (irradiated electron beam current), the electron beam diameter, and the material of the sample, and is 0.5-2mm/min, desirably.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2561479A JPS55117949A (en) | 1979-03-07 | 1979-03-07 | Auger electron spectroscopic analysis method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2561479A JPS55117949A (en) | 1979-03-07 | 1979-03-07 | Auger electron spectroscopic analysis method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55117949A true JPS55117949A (en) | 1980-09-10 |
Family
ID=12170756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2561479A Pending JPS55117949A (en) | 1979-03-07 | 1979-03-07 | Auger electron spectroscopic analysis method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55117949A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8732913B2 (en) | 2006-03-13 | 2014-05-27 | C.I. Kasei Company, Limited | Fastener and bag having fastener |
-
1979
- 1979-03-07 JP JP2561479A patent/JPS55117949A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8732913B2 (en) | 2006-03-13 | 2014-05-27 | C.I. Kasei Company, Limited | Fastener and bag having fastener |
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