JPS5397895A - X-ray analyzer - Google Patents

X-ray analyzer

Info

Publication number
JPS5397895A
JPS5397895A JP1286677A JP1286677A JPS5397895A JP S5397895 A JPS5397895 A JP S5397895A JP 1286677 A JP1286677 A JP 1286677A JP 1286677 A JP1286677 A JP 1286677A JP S5397895 A JPS5397895 A JP S5397895A
Authority
JP
Japan
Prior art keywords
ray analyzer
sample
electron beam
ray
ray spectrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1286677A
Other languages
Japanese (ja)
Other versions
JPS627974B2 (en
Inventor
Kiyoshi Harasawa
Shojiro Tagata
Jiyun Suzumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP1286677A priority Critical patent/JPS5397895A/en
Publication of JPS5397895A publication Critical patent/JPS5397895A/en
Publication of JPS627974B2 publication Critical patent/JPS627974B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To carry out surface analysis over a broad area without displacement of sample by providing a means for scanning electron beam on sample, X-ray spectrometer and X-ray detector, and altering the position is X-ray spectrometer corresponding to the position of the electron beam.
JP1286677A 1977-02-08 1977-02-08 X-ray analyzer Granted JPS5397895A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1286677A JPS5397895A (en) 1977-02-08 1977-02-08 X-ray analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1286677A JPS5397895A (en) 1977-02-08 1977-02-08 X-ray analyzer

Publications (2)

Publication Number Publication Date
JPS5397895A true JPS5397895A (en) 1978-08-26
JPS627974B2 JPS627974B2 (en) 1987-02-20

Family

ID=11817325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1286677A Granted JPS5397895A (en) 1977-02-08 1977-02-08 X-ray analyzer

Country Status (1)

Country Link
JP (1) JPS5397895A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6076652A (en) * 1983-09-30 1985-05-01 Shimadzu Corp Forming method of scanning x-ray image

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6076652A (en) * 1983-09-30 1985-05-01 Shimadzu Corp Forming method of scanning x-ray image

Also Published As

Publication number Publication date
JPS627974B2 (en) 1987-02-20

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