JPS5326191A - Specimen analyzer - Google Patents

Specimen analyzer

Info

Publication number
JPS5326191A
JPS5326191A JP9971776A JP9971776A JPS5326191A JP S5326191 A JPS5326191 A JP S5326191A JP 9971776 A JP9971776 A JP 9971776A JP 9971776 A JP9971776 A JP 9971776A JP S5326191 A JPS5326191 A JP S5326191A
Authority
JP
Japan
Prior art keywords
specimen analyzer
electrodes
accuracy
analysis
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9971776A
Other languages
Japanese (ja)
Inventor
Hiroshi Doi
Kazunobu Hayakawa
Susumu Kawase
Masakazu Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9971776A priority Critical patent/JPS5326191A/en
Publication of JPS5326191A publication Critical patent/JPS5326191A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To increase the accuracy of analysis by providing respective controlling electrodes on the outside, etc. of respective electrodes for secondary ion leadout and secondary electron lead out.
JP9971776A 1976-08-23 1976-08-23 Specimen analyzer Pending JPS5326191A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9971776A JPS5326191A (en) 1976-08-23 1976-08-23 Specimen analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9971776A JPS5326191A (en) 1976-08-23 1976-08-23 Specimen analyzer

Publications (1)

Publication Number Publication Date
JPS5326191A true JPS5326191A (en) 1978-03-10

Family

ID=14254814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9971776A Pending JPS5326191A (en) 1976-08-23 1976-08-23 Specimen analyzer

Country Status (1)

Country Link
JP (1) JPS5326191A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6166125U (en) * 1984-10-04 1986-05-07

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6166125U (en) * 1984-10-04 1986-05-07
JPH0339382Y2 (en) * 1984-10-04 1991-08-20

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