JPS5327487A - Sample analyzer - Google Patents

Sample analyzer

Info

Publication number
JPS5327487A
JPS5327487A JP10166176A JP10166176A JPS5327487A JP S5327487 A JPS5327487 A JP S5327487A JP 10166176 A JP10166176 A JP 10166176A JP 10166176 A JP10166176 A JP 10166176A JP S5327487 A JPS5327487 A JP S5327487A
Authority
JP
Japan
Prior art keywords
sample analyzer
analyzer
presetting
degrees
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10166176A
Other languages
Japanese (ja)
Inventor
Hiroshi Doi
Kazunobu Hayakawa
Susumu Kawase
Masakazu Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10166176A priority Critical patent/JPS5327487A/en
Publication of JPS5327487A publication Critical patent/JPS5327487A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To improve the analyzing precision of an ion analyzer by presetting the degrees of vacuum of portions of the analyzer at suitably different levels by differential exhaust systems.
JP10166176A 1976-08-27 1976-08-27 Sample analyzer Pending JPS5327487A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10166176A JPS5327487A (en) 1976-08-27 1976-08-27 Sample analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10166176A JPS5327487A (en) 1976-08-27 1976-08-27 Sample analyzer

Publications (1)

Publication Number Publication Date
JPS5327487A true JPS5327487A (en) 1978-03-14

Family

ID=14306546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10166176A Pending JPS5327487A (en) 1976-08-27 1976-08-27 Sample analyzer

Country Status (1)

Country Link
JP (1) JPS5327487A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62190192U (en) * 1986-05-26 1987-12-03

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62190192U (en) * 1986-05-26 1987-12-03
JPH0425595Y2 (en) * 1986-05-26 1992-06-18

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