JPS5284793A - Ion surce device of mass spectrometer - Google Patents

Ion surce device of mass spectrometer

Info

Publication number
JPS5284793A
JPS5284793A JP83176A JP83176A JPS5284793A JP S5284793 A JPS5284793 A JP S5284793A JP 83176 A JP83176 A JP 83176A JP 83176 A JP83176 A JP 83176A JP S5284793 A JPS5284793 A JP S5284793A
Authority
JP
Japan
Prior art keywords
ion
surce
mass spectrometer
source part
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP83176A
Other languages
Japanese (ja)
Inventor
Masayoshi Yano
Eiji Tajima
Tamotsu Noda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP83176A priority Critical patent/JPS5284793A/en
Publication of JPS5284793A publication Critical patent/JPS5284793A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make possible mounting and dismounting of an ion source part and specimen inlet tube mutually independently without affecting other parts by so composing the ion source part and specimen inlet pipe that their direction vary from the ion withdrawing direction.
COPYRIGHT: (C)1977,JPO&Japio
JP83176A 1976-01-07 1976-01-07 Ion surce device of mass spectrometer Pending JPS5284793A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP83176A JPS5284793A (en) 1976-01-07 1976-01-07 Ion surce device of mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP83176A JPS5284793A (en) 1976-01-07 1976-01-07 Ion surce device of mass spectrometer

Publications (1)

Publication Number Publication Date
JPS5284793A true JPS5284793A (en) 1977-07-14

Family

ID=11484561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP83176A Pending JPS5284793A (en) 1976-01-07 1976-01-07 Ion surce device of mass spectrometer

Country Status (1)

Country Link
JP (1) JPS5284793A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53140091A (en) * 1977-05-13 1978-12-06 Hitachi Ltd Ion source for mass spectrograph

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53140091A (en) * 1977-05-13 1978-12-06 Hitachi Ltd Ion source for mass spectrograph
JPS5935506B2 (en) * 1977-05-13 1984-08-29 株式会社日立製作所 Ion source for mass spectrometer

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