JPS5260687A - Gas analyzer - Google Patents

Gas analyzer

Info

Publication number
JPS5260687A
JPS5260687A JP50137607A JP13760775A JPS5260687A JP S5260687 A JPS5260687 A JP S5260687A JP 50137607 A JP50137607 A JP 50137607A JP 13760775 A JP13760775 A JP 13760775A JP S5260687 A JPS5260687 A JP S5260687A
Authority
JP
Japan
Prior art keywords
gas analyzer
gas
radiated
sprayed
accuracy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50137607A
Other languages
Japanese (ja)
Other versions
JPS5933222B2 (en
Inventor
Hiroyoshi Soejima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimadzu Seisakusho Ltd
Original Assignee
Shimadzu Corp
Shimadzu Seisakusho Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimadzu Seisakusho Ltd filed Critical Shimadzu Corp
Priority to JP50137607A priority Critical patent/JPS5933222B2/en
Publication of JPS5260687A publication Critical patent/JPS5260687A/en
Publication of JPS5933222B2 publication Critical patent/JPS5933222B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:Gaseous specimen is sprayed into an electron beam generating system maintained in a vacuum and electron beams are radiated to this gas, whereby a gas analyzer of high X-ray intensity and high analysis sensitivity and accuracy is obtained.
JP50137607A 1975-11-14 1975-11-14 gasbunsexouchi Expired JPS5933222B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50137607A JPS5933222B2 (en) 1975-11-14 1975-11-14 gasbunsexouchi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50137607A JPS5933222B2 (en) 1975-11-14 1975-11-14 gasbunsexouchi

Publications (2)

Publication Number Publication Date
JPS5260687A true JPS5260687A (en) 1977-05-19
JPS5933222B2 JPS5933222B2 (en) 1984-08-14

Family

ID=15202631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50137607A Expired JPS5933222B2 (en) 1975-11-14 1975-11-14 gasbunsexouchi

Country Status (1)

Country Link
JP (1) JPS5933222B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5369274A (en) * 1988-06-16 1994-11-29 Fraunhofer Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Method and an apparatus for the examination of structures on membrane surfaces

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5369274A (en) * 1988-06-16 1994-11-29 Fraunhofer Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Method and an apparatus for the examination of structures on membrane surfaces

Also Published As

Publication number Publication date
JPS5933222B2 (en) 1984-08-14

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