JPS569957A - Combined unit of ion gun, electron gun and analyzer in auger electron spectroscope - Google Patents

Combined unit of ion gun, electron gun and analyzer in auger electron spectroscope

Info

Publication number
JPS569957A
JPS569957A JP8443879A JP8443879A JPS569957A JP S569957 A JPS569957 A JP S569957A JP 8443879 A JP8443879 A JP 8443879A JP 8443879 A JP8443879 A JP 8443879A JP S569957 A JPS569957 A JP S569957A
Authority
JP
Japan
Prior art keywords
electron
gun
analyzer
ion
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8443879A
Other languages
Japanese (ja)
Other versions
JPS5857861B2 (en
Inventor
Yoshitaka Hayashi
Tetsuo Ishida
Yoshiro Shiokawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP54084438A priority Critical patent/JPS5857861B2/en
Publication of JPS569957A publication Critical patent/JPS569957A/en
Publication of JPS5857861B2 publication Critical patent/JPS5857861B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To permit the deepest part of a crater of ion etching to easily agree with its analyzed point, by arranging a position accuracy for the virtual point of analysis, targeted from an ion gun, electron gun and analyzer, to be determined all by a mechanical accuracy. CONSTITUTION:A combined unit comprises an ion gun 1, for irradiating an ion to a sample 6 to made it processed etching, an electron gun 2, that irradiates an electron to the sample 6 and allows an auger electron to be emitted from the sample 6, and an energy analyzer 3 of cylindrical mirror type which performs a work of elementary analysis by detecting the anger electron emitted from the sample 6. A positioning work is previously performed for a virtual point of analysis, and the ion gun 1 and the electron gun 2 are fixed to the outer face of the analyzer 3. Then to an analyzer mounting plate 4, to which the analyzer 3 is mounted, having a vacuum flange 4a fitted to a flange 8a of a port 8 of a vacuum vessel 5, electrical connection wires 1a and 2a of the ion gun 1 and the electron gun 2 to the atmospheric side are equipped in such a manner that a vacuum sealing in the vacuum vessel 5 can be maintained.
JP54084438A 1979-07-05 1979-07-05 Combination of ion gun, electron gun and analyzer in Auger electron spectrometer Expired JPS5857861B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54084438A JPS5857861B2 (en) 1979-07-05 1979-07-05 Combination of ion gun, electron gun and analyzer in Auger electron spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54084438A JPS5857861B2 (en) 1979-07-05 1979-07-05 Combination of ion gun, electron gun and analyzer in Auger electron spectrometer

Publications (2)

Publication Number Publication Date
JPS569957A true JPS569957A (en) 1981-01-31
JPS5857861B2 JPS5857861B2 (en) 1983-12-22

Family

ID=13830588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54084438A Expired JPS5857861B2 (en) 1979-07-05 1979-07-05 Combination of ion gun, electron gun and analyzer in Auger electron spectrometer

Country Status (1)

Country Link
JP (1) JPS5857861B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6396680A (en) * 1986-10-13 1988-04-27 Seikosha Co Ltd Developing device for electrophotographic recorder

Also Published As

Publication number Publication date
JPS5857861B2 (en) 1983-12-22

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