GB2010577A - Preparing specimens using an ion beam - Google Patents
Preparing specimens using an ion beamInfo
- Publication number
- GB2010577A GB2010577A GB7844005A GB7844005A GB2010577A GB 2010577 A GB2010577 A GB 2010577A GB 7844005 A GB7844005 A GB 7844005A GB 7844005 A GB7844005 A GB 7844005A GB 2010577 A GB2010577 A GB 2010577A
- Authority
- GB
- United Kingdom
- Prior art keywords
- specimen
- ion beam
- ion
- irradiated
- required thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/32—Polishing; Etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
Specimens are prepared for examination by transmission electron microscopy techniques by making them suitably thin by using an ion source which is cooled so that the specimen can be placed close to the cathode of the ion source and the concentration of the beam impinging on the specimen to thin it is increased whereby to improve the rate at which the specimen is thinned to a required thickness without deleteriously affecting its structure. The specimen may be held stationary or may be rotated and be so disposed that the ion beam impinges normally or at any convenient angle, e.g. 60 DEG , thereto. Initially, one side of the specimen may be irradiated by the ion beam for a short while, the specimen then being reversed and the other side irradiated to the required thickness, which may be determined by monitoring the ion current penetrating the specimen.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB7844005A GB2010577B (en) | 1977-11-07 | 1978-11-10 | Preparation of materials for examination of transmission electron microscopy techniques |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB4631177 | 1977-11-07 | ||
GB7844005A GB2010577B (en) | 1977-11-07 | 1978-11-10 | Preparation of materials for examination of transmission electron microscopy techniques |
Publications (2)
Publication Number | Publication Date |
---|---|
GB2010577A true GB2010577A (en) | 1979-06-27 |
GB2010577B GB2010577B (en) | 1982-05-06 |
Family
ID=26265789
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB7844005A Expired GB2010577B (en) | 1977-11-07 | 1978-11-10 | Preparation of materials for examination of transmission electron microscopy techniques |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2010577B (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2503367A1 (en) * | 1981-03-31 | 1982-10-08 | Ion Tech Ltd | PROCESS AND DEVICE FOR PREPARING SAMPLES FOR EXAMINATION BY ELECTRON MICROSCOPE |
EP0141272A1 (en) * | 1983-10-12 | 1985-05-15 | Magyar Tudományos Akadémia Müszaki Fizikai Kutato Intézete | Apparatus for processing solid state samples with ion beams |
GB2227601A (en) * | 1988-12-01 | 1990-08-01 | Seiko Instr Inc | "Preparing a micro-section in a sample for observation" |
EP0435271A2 (en) * | 1989-12-26 | 1991-07-03 | Sharp Kabushiki Kaisha | An apparatus and a method for checking a semiconductor |
EP0687897A1 (en) * | 1994-06-14 | 1995-12-20 | Hitachi, Ltd. | Method for making specimen and apparatus thereof |
AT509608A4 (en) * | 2010-12-23 | 2011-10-15 | Leica Mikrosysteme Gmbh | DEVICE AND METHOD FOR COOLING SAMPLES DURING ONE ION BEAM PREPARATION |
CN111208153A (en) * | 2020-01-20 | 2020-05-29 | 航天科工防御技术研究试验中心 | Tin-based lead-free welding spot transmission sample and preparation method thereof |
-
1978
- 1978-11-10 GB GB7844005A patent/GB2010577B/en not_active Expired
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2503367A1 (en) * | 1981-03-31 | 1982-10-08 | Ion Tech Ltd | PROCESS AND DEVICE FOR PREPARING SAMPLES FOR EXAMINATION BY ELECTRON MICROSCOPE |
EP0141272A1 (en) * | 1983-10-12 | 1985-05-15 | Magyar Tudományos Akadémia Müszaki Fizikai Kutato Intézete | Apparatus for processing solid state samples with ion beams |
GB2227601A (en) * | 1988-12-01 | 1990-08-01 | Seiko Instr Inc | "Preparing a micro-section in a sample for observation" |
GB2227601B (en) * | 1988-12-01 | 1993-02-24 | Seiko Instr Inc | Method of forming a micro-section |
EP0435271A2 (en) * | 1989-12-26 | 1991-07-03 | Sharp Kabushiki Kaisha | An apparatus and a method for checking a semiconductor |
EP0435271B1 (en) * | 1989-12-26 | 1997-05-07 | Sharp Kabushiki Kaisha | An apparatus and a method for checking a semiconductor |
EP0687897A1 (en) * | 1994-06-14 | 1995-12-20 | Hitachi, Ltd. | Method for making specimen and apparatus thereof |
US5656811A (en) * | 1994-06-14 | 1997-08-12 | Hitachi, Ltd. | Method for making specimen and apparatus thereof |
AT509608A4 (en) * | 2010-12-23 | 2011-10-15 | Leica Mikrosysteme Gmbh | DEVICE AND METHOD FOR COOLING SAMPLES DURING ONE ION BEAM PREPARATION |
AT509608B1 (en) * | 2010-12-23 | 2011-10-15 | Leica Mikrosysteme Gmbh | DEVICE AND METHOD FOR COOLING SAMPLES DURING ONE ION BEAM PREPARATION |
CN111208153A (en) * | 2020-01-20 | 2020-05-29 | 航天科工防御技术研究试验中心 | Tin-based lead-free welding spot transmission sample and preparation method thereof |
CN111208153B (en) * | 2020-01-20 | 2024-02-27 | 航天科工防御技术研究试验中心 | Tin-based lead-free welding spot transmission sample and preparation method thereof |
Also Published As
Publication number | Publication date |
---|---|
GB2010577B (en) | 1982-05-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |