JPS5252562A - Electron beam scanning type sample image pick-up device - Google Patents

Electron beam scanning type sample image pick-up device

Info

Publication number
JPS5252562A
JPS5252562A JP12960975A JP12960975A JPS5252562A JP S5252562 A JPS5252562 A JP S5252562A JP 12960975 A JP12960975 A JP 12960975A JP 12960975 A JP12960975 A JP 12960975A JP S5252562 A JPS5252562 A JP S5252562A
Authority
JP
Japan
Prior art keywords
electron beam
sample image
beam scanning
image pick
scanning type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12960975A
Other languages
Japanese (ja)
Inventor
Gen Date
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimadzu Seisakusho Ltd
Original Assignee
Shimadzu Corp
Shimadzu Seisakusho Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimadzu Seisakusho Ltd filed Critical Shimadzu Corp
Priority to JP12960975A priority Critical patent/JPS5252562A/en
Publication of JPS5252562A publication Critical patent/JPS5252562A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To improve the contrast and smoothness of images by providing an auxiliary electrode between the specimen and the attraction electrode in an electron microscope and effectively induce the electrons from the specimen surface to a detector.
COPYRIGHT: (C)1977,JPO&Japio
JP12960975A 1975-10-27 1975-10-27 Electron beam scanning type sample image pick-up device Pending JPS5252562A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12960975A JPS5252562A (en) 1975-10-27 1975-10-27 Electron beam scanning type sample image pick-up device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12960975A JPS5252562A (en) 1975-10-27 1975-10-27 Electron beam scanning type sample image pick-up device

Publications (1)

Publication Number Publication Date
JPS5252562A true JPS5252562A (en) 1977-04-27

Family

ID=15013681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12960975A Pending JPS5252562A (en) 1975-10-27 1975-10-27 Electron beam scanning type sample image pick-up device

Country Status (1)

Country Link
JP (1) JPS5252562A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4928010A (en) * 1986-11-28 1990-05-22 Nippon Telegraph And Telephone Corp. Observing a surface using a charged particle beam
JP2008210702A (en) * 2007-02-27 2008-09-11 Hitachi High-Technologies Corp Charged particle beam device and applied voltage control method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4928010A (en) * 1986-11-28 1990-05-22 Nippon Telegraph And Telephone Corp. Observing a surface using a charged particle beam
JP2008210702A (en) * 2007-02-27 2008-09-11 Hitachi High-Technologies Corp Charged particle beam device and applied voltage control method

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