JPS5252562A - Electron beam scanning type sample image pick-up device - Google Patents
Electron beam scanning type sample image pick-up deviceInfo
- Publication number
- JPS5252562A JPS5252562A JP12960975A JP12960975A JPS5252562A JP S5252562 A JPS5252562 A JP S5252562A JP 12960975 A JP12960975 A JP 12960975A JP 12960975 A JP12960975 A JP 12960975A JP S5252562 A JPS5252562 A JP S5252562A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- sample image
- beam scanning
- image pick
- scanning type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To improve the contrast and smoothness of images by providing an auxiliary electrode between the specimen and the attraction electrode in an electron microscope and effectively induce the electrons from the specimen surface to a detector.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12960975A JPS5252562A (en) | 1975-10-27 | 1975-10-27 | Electron beam scanning type sample image pick-up device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12960975A JPS5252562A (en) | 1975-10-27 | 1975-10-27 | Electron beam scanning type sample image pick-up device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5252562A true JPS5252562A (en) | 1977-04-27 |
Family
ID=15013681
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12960975A Pending JPS5252562A (en) | 1975-10-27 | 1975-10-27 | Electron beam scanning type sample image pick-up device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5252562A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4928010A (en) * | 1986-11-28 | 1990-05-22 | Nippon Telegraph And Telephone Corp. | Observing a surface using a charged particle beam |
JP2008210702A (en) * | 2007-02-27 | 2008-09-11 | Hitachi High-Technologies Corp | Charged particle beam device and applied voltage control method |
-
1975
- 1975-10-27 JP JP12960975A patent/JPS5252562A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4928010A (en) * | 1986-11-28 | 1990-05-22 | Nippon Telegraph And Telephone Corp. | Observing a surface using a charged particle beam |
JP2008210702A (en) * | 2007-02-27 | 2008-09-11 | Hitachi High-Technologies Corp | Charged particle beam device and applied voltage control method |
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