JPS5346266A - Electronic microscope - Google Patents

Electronic microscope

Info

Publication number
JPS5346266A
JPS5346266A JP12038576A JP12038576A JPS5346266A JP S5346266 A JPS5346266 A JP S5346266A JP 12038576 A JP12038576 A JP 12038576A JP 12038576 A JP12038576 A JP 12038576A JP S5346266 A JPS5346266 A JP S5346266A
Authority
JP
Japan
Prior art keywords
electronic microscope
projection lens
moving
test piece
providing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12038576A
Other languages
Japanese (ja)
Inventor
Hiroshi Akahori
Teiji Katsuta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12038576A priority Critical patent/JPS5346266A/en
Publication of JPS5346266A publication Critical patent/JPS5346266A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain the object image at arbitrary locations, by providing the electron ray deflecting means between the projection lens of the final stage and the lenses before and after it, moving the test piece image on the projection lens, and further exchanging the photographic plate.
COPYRIGHT: (C)1978,JPO&Japio
JP12038576A 1976-10-08 1976-10-08 Electronic microscope Pending JPS5346266A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12038576A JPS5346266A (en) 1976-10-08 1976-10-08 Electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12038576A JPS5346266A (en) 1976-10-08 1976-10-08 Electronic microscope

Publications (1)

Publication Number Publication Date
JPS5346266A true JPS5346266A (en) 1978-04-25

Family

ID=14784891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12038576A Pending JPS5346266A (en) 1976-10-08 1976-10-08 Electronic microscope

Country Status (1)

Country Link
JP (1) JPS5346266A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5764958A (en) * 1980-10-08 1982-04-20 Nec Corp Manufacture of hybrid integrated circuit device
JPS61126750A (en) * 1984-11-22 1986-06-14 Hitachi Ltd Electron microscope
WO2010050136A1 (en) * 2008-10-31 2010-05-06 株式会社 日立ハイテクノロジーズ Method for observing sample and electronic microscope

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5764958A (en) * 1980-10-08 1982-04-20 Nec Corp Manufacture of hybrid integrated circuit device
JPS61126750A (en) * 1984-11-22 1986-06-14 Hitachi Ltd Electron microscope
WO2010050136A1 (en) * 2008-10-31 2010-05-06 株式会社 日立ハイテクノロジーズ Method for observing sample and electronic microscope
JP2010108797A (en) * 2008-10-31 2010-05-13 Hitachi High-Technologies Corp Test piece observation method, and electron microscope
US9013572B2 (en) 2008-10-31 2015-04-21 Hitachi High-Technologies Corporation Method for observing sample and electronic microscope

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