JPS5346266A - Electronic microscope - Google Patents
Electronic microscopeInfo
- Publication number
- JPS5346266A JPS5346266A JP12038576A JP12038576A JPS5346266A JP S5346266 A JPS5346266 A JP S5346266A JP 12038576 A JP12038576 A JP 12038576A JP 12038576 A JP12038576 A JP 12038576A JP S5346266 A JPS5346266 A JP S5346266A
- Authority
- JP
- Japan
- Prior art keywords
- electronic microscope
- projection lens
- moving
- test piece
- providing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain the object image at arbitrary locations, by providing the electron ray deflecting means between the projection lens of the final stage and the lenses before and after it, moving the test piece image on the projection lens, and further exchanging the photographic plate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12038576A JPS5346266A (en) | 1976-10-08 | 1976-10-08 | Electronic microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12038576A JPS5346266A (en) | 1976-10-08 | 1976-10-08 | Electronic microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5346266A true JPS5346266A (en) | 1978-04-25 |
Family
ID=14784891
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12038576A Pending JPS5346266A (en) | 1976-10-08 | 1976-10-08 | Electronic microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5346266A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5764958A (en) * | 1980-10-08 | 1982-04-20 | Nec Corp | Manufacture of hybrid integrated circuit device |
JPS61126750A (en) * | 1984-11-22 | 1986-06-14 | Hitachi Ltd | Electron microscope |
WO2010050136A1 (en) * | 2008-10-31 | 2010-05-06 | 株式会社 日立ハイテクノロジーズ | Method for observing sample and electronic microscope |
-
1976
- 1976-10-08 JP JP12038576A patent/JPS5346266A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5764958A (en) * | 1980-10-08 | 1982-04-20 | Nec Corp | Manufacture of hybrid integrated circuit device |
JPS61126750A (en) * | 1984-11-22 | 1986-06-14 | Hitachi Ltd | Electron microscope |
WO2010050136A1 (en) * | 2008-10-31 | 2010-05-06 | 株式会社 日立ハイテクノロジーズ | Method for observing sample and electronic microscope |
JP2010108797A (en) * | 2008-10-31 | 2010-05-13 | Hitachi High-Technologies Corp | Test piece observation method, and electron microscope |
US9013572B2 (en) | 2008-10-31 | 2015-04-21 | Hitachi High-Technologies Corporation | Method for observing sample and electronic microscope |
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