JPS5360162A - Electron beam irradiation device - Google Patents
Electron beam irradiation deviceInfo
- Publication number
- JPS5360162A JPS5360162A JP13498676A JP13498676A JPS5360162A JP S5360162 A JPS5360162 A JP S5360162A JP 13498676 A JP13498676 A JP 13498676A JP 13498676 A JP13498676 A JP 13498676A JP S5360162 A JPS5360162 A JP S5360162A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- beam irradiation
- irradiation device
- draw
- requires
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To draw an aperture image of electron beam to be applied for an electron beam exposure device, etc. which requires a high drawing accuracy.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13498676A JPS5360162A (en) | 1976-11-10 | 1976-11-10 | Electron beam irradiation device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13498676A JPS5360162A (en) | 1976-11-10 | 1976-11-10 | Electron beam irradiation device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5360162A true JPS5360162A (en) | 1978-05-30 |
JPS5754906B2 JPS5754906B2 (en) | 1982-11-20 |
Family
ID=15141243
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13498676A Granted JPS5360162A (en) | 1976-11-10 | 1976-11-10 | Electron beam irradiation device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5360162A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0214825A2 (en) * | 1985-09-13 | 1987-03-18 | Ford Motor Company Limited | Vibration damper |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62153628A (en) * | 1985-12-23 | 1987-07-08 | Toshiba Corp | Cooking device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50105381A (en) * | 1974-01-28 | 1975-08-20 | ||
JPS5129091A (en) * | 1974-09-06 | 1976-03-11 | Kogyo Gijutsuin | PATAANKEISEISOCHI |
-
1976
- 1976-11-10 JP JP13498676A patent/JPS5360162A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50105381A (en) * | 1974-01-28 | 1975-08-20 | ||
JPS5129091A (en) * | 1974-09-06 | 1976-03-11 | Kogyo Gijutsuin | PATAANKEISEISOCHI |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0214825A2 (en) * | 1985-09-13 | 1987-03-18 | Ford Motor Company Limited | Vibration damper |
EP0214825A3 (en) * | 1985-09-13 | 1987-07-29 | Ford Motor Company Limited | Vibration damper |
Also Published As
Publication number | Publication date |
---|---|
JPS5754906B2 (en) | 1982-11-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS51111076A (en) | Exposure device | |
JPS52119178A (en) | Electron beam exposure device | |
JPS5385188A (en) | Pulse x-ray apparatus | |
JPS5357760A (en) | Electron beam exposure apparatus | |
JPS52139381A (en) | Electron beam exposure apparatus | |
JPS5360162A (en) | Electron beam irradiation device | |
JPS524178A (en) | Small object automatic positioning apparatus | |
JPS5276879A (en) | Counting device for number of exposure times of electron beam exposure device | |
JPS53120277A (en) | Electron beam exposure device | |
JPS51118968A (en) | Electron beam exposure device | |
JPS51148370A (en) | Electron ray exposure method | |
JPS52130570A (en) | Electron beam exposing device | |
JPS53145476A (en) | Electron beam exposure apparatus | |
JPS51140577A (en) | Wafer holder for electronic beam exposing device | |
JPS53145477A (en) | Electron beam exposure method | |
JPS5437685A (en) | Electron beam exposure unit | |
JPS5251873A (en) | Electron beam exposure device | |
JPS51116669A (en) | Film cassette for an electron microscope or other apparatus | |
JPS5437474A (en) | Electron beam exposure device | |
JPS52117578A (en) | Electron beam exposing method | |
JPS5350978A (en) | Electron beam exposure method | |
JPS53140963A (en) | Scanning electronic microscope | |
JPS51142277A (en) | Device for electron-beam exposure | |
JPS5396676A (en) | Method and apparatus for positioning by electron beam exposure | |
JPS5357763A (en) | Diaphragm of electron beam exposure apparatus |