JPS5360162A - Electron beam irradiation device - Google Patents

Electron beam irradiation device

Info

Publication number
JPS5360162A
JPS5360162A JP13498676A JP13498676A JPS5360162A JP S5360162 A JPS5360162 A JP S5360162A JP 13498676 A JP13498676 A JP 13498676A JP 13498676 A JP13498676 A JP 13498676A JP S5360162 A JPS5360162 A JP S5360162A
Authority
JP
Japan
Prior art keywords
electron beam
beam irradiation
irradiation device
draw
requires
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13498676A
Other languages
Japanese (ja)
Other versions
JPS5754906B2 (en
Inventor
Tadahiro Takigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13498676A priority Critical patent/JPS5360162A/en
Publication of JPS5360162A publication Critical patent/JPS5360162A/en
Publication of JPS5754906B2 publication Critical patent/JPS5754906B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To draw an aperture image of electron beam to be applied for an electron beam exposure device, etc. which requires a high drawing accuracy.
COPYRIGHT: (C)1978,JPO&Japio
JP13498676A 1976-11-10 1976-11-10 Electron beam irradiation device Granted JPS5360162A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13498676A JPS5360162A (en) 1976-11-10 1976-11-10 Electron beam irradiation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13498676A JPS5360162A (en) 1976-11-10 1976-11-10 Electron beam irradiation device

Publications (2)

Publication Number Publication Date
JPS5360162A true JPS5360162A (en) 1978-05-30
JPS5754906B2 JPS5754906B2 (en) 1982-11-20

Family

ID=15141243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13498676A Granted JPS5360162A (en) 1976-11-10 1976-11-10 Electron beam irradiation device

Country Status (1)

Country Link
JP (1) JPS5360162A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0214825A2 (en) * 1985-09-13 1987-03-18 Ford Motor Company Limited Vibration damper

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62153628A (en) * 1985-12-23 1987-07-08 Toshiba Corp Cooking device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50105381A (en) * 1974-01-28 1975-08-20
JPS5129091A (en) * 1974-09-06 1976-03-11 Kogyo Gijutsuin PATAANKEISEISOCHI

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50105381A (en) * 1974-01-28 1975-08-20
JPS5129091A (en) * 1974-09-06 1976-03-11 Kogyo Gijutsuin PATAANKEISEISOCHI

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0214825A2 (en) * 1985-09-13 1987-03-18 Ford Motor Company Limited Vibration damper
EP0214825A3 (en) * 1985-09-13 1987-07-29 Ford Motor Company Limited Vibration damper

Also Published As

Publication number Publication date
JPS5754906B2 (en) 1982-11-20

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