JPS53140963A - Scanning electronic microscope - Google Patents

Scanning electronic microscope

Info

Publication number
JPS53140963A
JPS53140963A JP5616977A JP5616977A JPS53140963A JP S53140963 A JPS53140963 A JP S53140963A JP 5616977 A JP5616977 A JP 5616977A JP 5616977 A JP5616977 A JP 5616977A JP S53140963 A JPS53140963 A JP S53140963A
Authority
JP
Japan
Prior art keywords
electronic microscope
scanning electronic
electron beam
test piece
distrortion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5616977A
Other languages
Japanese (ja)
Other versions
JPS586267B2 (en
Inventor
Toshiyuki Yamamoto
Eiichi Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP52056169A priority Critical patent/JPS586267B2/en
Publication of JPS53140963A publication Critical patent/JPS53140963A/en
Publication of JPS586267B2 publication Critical patent/JPS586267B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To enable to perform sufficient identification of lattice distrortion, by scanning electron beam on a test piece while keeping the incident angle of the parallel electron beam to the test piece at a constant value.
COPYRIGHT: (C)1978,JPO&Japio
JP52056169A 1977-05-16 1977-05-16 scanning electron microscope Expired JPS586267B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52056169A JPS586267B2 (en) 1977-05-16 1977-05-16 scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52056169A JPS586267B2 (en) 1977-05-16 1977-05-16 scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS53140963A true JPS53140963A (en) 1978-12-08
JPS586267B2 JPS586267B2 (en) 1983-02-03

Family

ID=13019586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52056169A Expired JPS586267B2 (en) 1977-05-16 1977-05-16 scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS586267B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS545387A (en) * 1977-06-15 1979-01-16 Hitachi Ltd Electron beam deflection scanner
JPS5912553A (en) * 1982-07-12 1984-01-23 Jeol Ltd Electron ray device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6388750U (en) * 1986-11-29 1988-06-09

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5091252A (en) * 1973-12-12 1975-07-21
JPS5424262A (en) * 1977-07-26 1979-02-23 Minoru Nakamura Method of making metal granules

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5091252A (en) * 1973-12-12 1975-07-21
JPS5424262A (en) * 1977-07-26 1979-02-23 Minoru Nakamura Method of making metal granules

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS545387A (en) * 1977-06-15 1979-01-16 Hitachi Ltd Electron beam deflection scanner
JPS5820098B2 (en) * 1977-06-15 1983-04-21 株式会社日立製作所 Electron beam deflection scanning device
JPS5912553A (en) * 1982-07-12 1984-01-23 Jeol Ltd Electron ray device

Also Published As

Publication number Publication date
JPS586267B2 (en) 1983-02-03

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