JPS53140963A - Scanning electronic microscope - Google Patents
Scanning electronic microscopeInfo
- Publication number
- JPS53140963A JPS53140963A JP5616977A JP5616977A JPS53140963A JP S53140963 A JPS53140963 A JP S53140963A JP 5616977 A JP5616977 A JP 5616977A JP 5616977 A JP5616977 A JP 5616977A JP S53140963 A JPS53140963 A JP S53140963A
- Authority
- JP
- Japan
- Prior art keywords
- electronic microscope
- scanning electronic
- electron beam
- test piece
- distrortion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To enable to perform sufficient identification of lattice distrortion, by scanning electron beam on a test piece while keeping the incident angle of the parallel electron beam to the test piece at a constant value.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52056169A JPS586267B2 (en) | 1977-05-16 | 1977-05-16 | scanning electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52056169A JPS586267B2 (en) | 1977-05-16 | 1977-05-16 | scanning electron microscope |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53140963A true JPS53140963A (en) | 1978-12-08 |
JPS586267B2 JPS586267B2 (en) | 1983-02-03 |
Family
ID=13019586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52056169A Expired JPS586267B2 (en) | 1977-05-16 | 1977-05-16 | scanning electron microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS586267B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS545387A (en) * | 1977-06-15 | 1979-01-16 | Hitachi Ltd | Electron beam deflection scanner |
JPS5912553A (en) * | 1982-07-12 | 1984-01-23 | Jeol Ltd | Electron ray device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6388750U (en) * | 1986-11-29 | 1988-06-09 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5091252A (en) * | 1973-12-12 | 1975-07-21 | ||
JPS5424262A (en) * | 1977-07-26 | 1979-02-23 | Minoru Nakamura | Method of making metal granules |
-
1977
- 1977-05-16 JP JP52056169A patent/JPS586267B2/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5091252A (en) * | 1973-12-12 | 1975-07-21 | ||
JPS5424262A (en) * | 1977-07-26 | 1979-02-23 | Minoru Nakamura | Method of making metal granules |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS545387A (en) * | 1977-06-15 | 1979-01-16 | Hitachi Ltd | Electron beam deflection scanner |
JPS5820098B2 (en) * | 1977-06-15 | 1983-04-21 | 株式会社日立製作所 | Electron beam deflection scanning device |
JPS5912553A (en) * | 1982-07-12 | 1984-01-23 | Jeol Ltd | Electron ray device |
Also Published As
Publication number | Publication date |
---|---|
JPS586267B2 (en) | 1983-02-03 |
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