JPS52104865A - X-ray analysis apparatus in electronic microscope or like - Google Patents
X-ray analysis apparatus in electronic microscope or likeInfo
- Publication number
- JPS52104865A JPS52104865A JP2110576A JP2110576A JPS52104865A JP S52104865 A JPS52104865 A JP S52104865A JP 2110576 A JP2110576 A JP 2110576A JP 2110576 A JP2110576 A JP 2110576A JP S52104865 A JPS52104865 A JP S52104865A
- Authority
- JP
- Japan
- Prior art keywords
- analysis apparatus
- ray analysis
- electronic microscope
- ray
- detecting element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To increase the detecting sensitivity for X-ray, by arranging the X-ray detecting element between pole pieces of electron lens so as to be lesser distance between a speciment and the detecting element.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2110576A JPS52104865A (en) | 1976-03-01 | 1976-03-01 | X-ray analysis apparatus in electronic microscope or like |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2110576A JPS52104865A (en) | 1976-03-01 | 1976-03-01 | X-ray analysis apparatus in electronic microscope or like |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52104865A true JPS52104865A (en) | 1977-09-02 |
Family
ID=12045583
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2110576A Pending JPS52104865A (en) | 1976-03-01 | 1976-03-01 | X-ray analysis apparatus in electronic microscope or like |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52104865A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH076724A (en) * | 1993-06-15 | 1995-01-10 | Topcon Corp | Analytical electron microscope |
JPH0714538A (en) * | 1993-06-25 | 1995-01-17 | Topcon Corp | Analytic electron microscope |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4917906A (en) * | 1972-06-06 | 1974-02-16 | ||
JPS50145174A (en) * | 1974-05-10 | 1975-11-21 |
-
1976
- 1976-03-01 JP JP2110576A patent/JPS52104865A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4917906A (en) * | 1972-06-06 | 1974-02-16 | ||
JPS50145174A (en) * | 1974-05-10 | 1975-11-21 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH076724A (en) * | 1993-06-15 | 1995-01-10 | Topcon Corp | Analytical electron microscope |
JPH0714538A (en) * | 1993-06-25 | 1995-01-17 | Topcon Corp | Analytic electron microscope |
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