JPS5267568A - Analogous device of scanning type electronic microscope, etc. - Google Patents

Analogous device of scanning type electronic microscope, etc.

Info

Publication number
JPS5267568A
JPS5267568A JP14300675A JP14300675A JPS5267568A JP S5267568 A JPS5267568 A JP S5267568A JP 14300675 A JP14300675 A JP 14300675A JP 14300675 A JP14300675 A JP 14300675A JP S5267568 A JPS5267568 A JP S5267568A
Authority
JP
Japan
Prior art keywords
type electronic
scanning type
electronic microscope
analogous device
analogous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14300675A
Other languages
Japanese (ja)
Inventor
Shozo Kasai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14300675A priority Critical patent/JPS5267568A/en
Publication of JPS5267568A publication Critical patent/JPS5267568A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make it possible to detect the secondary electron or the X ray from the test piece without difficulties, by inclining the condenser lens and the object lens by a suitable angle.
COPYRIGHT: (C)1977,JPO&Japio
JP14300675A 1975-12-03 1975-12-03 Analogous device of scanning type electronic microscope, etc. Pending JPS5267568A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14300675A JPS5267568A (en) 1975-12-03 1975-12-03 Analogous device of scanning type electronic microscope, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14300675A JPS5267568A (en) 1975-12-03 1975-12-03 Analogous device of scanning type electronic microscope, etc.

Publications (1)

Publication Number Publication Date
JPS5267568A true JPS5267568A (en) 1977-06-04

Family

ID=15328747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14300675A Pending JPS5267568A (en) 1975-12-03 1975-12-03 Analogous device of scanning type electronic microscope, etc.

Country Status (1)

Country Link
JP (1) JPS5267568A (en)

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