JPS5267568A - Analogous device of scanning type electronic microscope, etc. - Google Patents
Analogous device of scanning type electronic microscope, etc.Info
- Publication number
- JPS5267568A JPS5267568A JP14300675A JP14300675A JPS5267568A JP S5267568 A JPS5267568 A JP S5267568A JP 14300675 A JP14300675 A JP 14300675A JP 14300675 A JP14300675 A JP 14300675A JP S5267568 A JPS5267568 A JP S5267568A
- Authority
- JP
- Japan
- Prior art keywords
- type electronic
- scanning type
- electronic microscope
- analogous device
- analogous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make it possible to detect the secondary electron or the X ray from the test piece without difficulties, by inclining the condenser lens and the object lens by a suitable angle.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14300675A JPS5267568A (en) | 1975-12-03 | 1975-12-03 | Analogous device of scanning type electronic microscope, etc. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14300675A JPS5267568A (en) | 1975-12-03 | 1975-12-03 | Analogous device of scanning type electronic microscope, etc. |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5267568A true JPS5267568A (en) | 1977-06-04 |
Family
ID=15328747
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14300675A Pending JPS5267568A (en) | 1975-12-03 | 1975-12-03 | Analogous device of scanning type electronic microscope, etc. |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5267568A (en) |
-
1975
- 1975-12-03 JP JP14300675A patent/JPS5267568A/en active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5234785A (en) | Mass spectrometer | |
JPS522591A (en) | Supersonic wave emitting and receiving device | |
JPS5239366A (en) | Electronic gun device | |
JPS5267568A (en) | Analogous device of scanning type electronic microscope, etc. | |
JPS544061A (en) | Test piece chamber for electronic microscope or the like | |
JPS5232627A (en) | Picture input equipment | |
JPS51116671A (en) | Scanning type electron microscope | |
JPS5244158A (en) | Scanning electronic microscope | |
JPS53140963A (en) | Scanning electronic microscope | |
JPS5418269A (en) | Electron beam detector | |
JPS5353975A (en) | Electronic beam exposure device | |
JPS5264865A (en) | Focus detection unit of electronic line scanning-type image equipment | |
JPS53117463A (en) | Position detection method | |
JPS5423465A (en) | Electronic microscope | |
JPS52122461A (en) | Electronic microscope | |
JPS51124370A (en) | Focus correction device for scanning type electron microscope | |
JPS51120170A (en) | Scanning type elestson microscope | |
JPS52122462A (en) | Electronic microscope | |
JPS5219958A (en) | Scanning electron microscope | |
JPS51114018A (en) | Aperture compensation circuit | |
JPS5411678A (en) | Electron ray unit | |
JPS5437474A (en) | Electron beam exposure device | |
JPS52150959A (en) | Electronic microscope or its similar device | |
JPS51114858A (en) | Focal point astigmatic condition display equipment for electron beam p robe | |
JPS5271972A (en) | Acceleration tube |