JPS52122462A - Electronic microscope - Google Patents

Electronic microscope

Info

Publication number
JPS52122462A
JPS52122462A JP3825076A JP3825076A JPS52122462A JP S52122462 A JPS52122462 A JP S52122462A JP 3825076 A JP3825076 A JP 3825076A JP 3825076 A JP3825076 A JP 3825076A JP S52122462 A JPS52122462 A JP S52122462A
Authority
JP
Japan
Prior art keywords
electronic microscope
eatablisher
shifiting
scintillator
spot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3825076A
Other languages
Japanese (ja)
Other versions
JPS5731622B2 (en
Inventor
Tadao Watabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3825076A priority Critical patent/JPS52122462A/en
Publication of JPS52122462A publication Critical patent/JPS52122462A/en
Publication of JPS5731622B2 publication Critical patent/JPS5731622B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To prevent the damage of scintillator when performing the element analysis, by means of preventing an electron beam, in the local position in a transmitting scanning image by using a spot shifiting eatablisher.
COPYRIGHT: (C)1977,JPO&Japio
JP3825076A 1976-04-07 1976-04-07 Electronic microscope Granted JPS52122462A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3825076A JPS52122462A (en) 1976-04-07 1976-04-07 Electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3825076A JPS52122462A (en) 1976-04-07 1976-04-07 Electronic microscope

Publications (2)

Publication Number Publication Date
JPS52122462A true JPS52122462A (en) 1977-10-14
JPS5731622B2 JPS5731622B2 (en) 1982-07-06

Family

ID=12520052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3825076A Granted JPS52122462A (en) 1976-04-07 1976-04-07 Electronic microscope

Country Status (1)

Country Link
JP (1) JPS52122462A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6991084B2 (en) 2018-03-22 2022-01-12 キオクシア株式会社 Non-volatile memory device and control method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50115468A (en) * 1974-02-20 1975-09-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50115468A (en) * 1974-02-20 1975-09-10

Also Published As

Publication number Publication date
JPS5731622B2 (en) 1982-07-06

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