JPS5322357A - Beam blanking unit - Google Patents

Beam blanking unit

Info

Publication number
JPS5322357A
JPS5322357A JP9686576A JP9686576A JPS5322357A JP S5322357 A JPS5322357 A JP S5322357A JP 9686576 A JP9686576 A JP 9686576A JP 9686576 A JP9686576 A JP 9686576A JP S5322357 A JPS5322357 A JP S5322357A
Authority
JP
Japan
Prior art keywords
blanking unit
beam blanking
electron beam
shutting
deflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9686576A
Other languages
Japanese (ja)
Other versions
JPS5716466B2 (en
Inventor
Moriyuki Isobe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP9686576A priority Critical patent/JPS5322357A/en
Publication of JPS5322357A publication Critical patent/JPS5322357A/en
Publication of JPS5716466B2 publication Critical patent/JPS5716466B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: An electron beam is deflected to the direction different from the original projection direction by using a small deflection signal, thereby shutting the electron beam efficiently.
COPYRIGHT: (C)1978,JPO&Japio
JP9686576A 1976-08-13 1976-08-13 Beam blanking unit Granted JPS5322357A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9686576A JPS5322357A (en) 1976-08-13 1976-08-13 Beam blanking unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9686576A JPS5322357A (en) 1976-08-13 1976-08-13 Beam blanking unit

Publications (2)

Publication Number Publication Date
JPS5322357A true JPS5322357A (en) 1978-03-01
JPS5716466B2 JPS5716466B2 (en) 1982-04-05

Family

ID=14176330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9686576A Granted JPS5322357A (en) 1976-08-13 1976-08-13 Beam blanking unit

Country Status (1)

Country Link
JP (1) JPS5322357A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4445041A (en) * 1981-06-02 1984-04-24 Hewlett-Packard Company Electron beam blanker
JPS59118679A (en) * 1982-12-23 1984-07-09 三菱電機株式会社 Circular escalator
JPS59188480U (en) * 1983-05-30 1984-12-14 明昌特殊産業株式会社 Game machine boarding device

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58195754U (en) * 1982-06-22 1983-12-26 ワイケイケイ株式会社 Lock holder mounting structure
JPS5933965U (en) * 1982-08-27 1984-03-02 昭和鋼機株式会社 Adjustment and mounting device for door locking handle bracket
JPS5996249U (en) * 1982-12-20 1984-06-29 ワイケイケイ株式会社 lock holder
JPS6010055U (en) * 1983-06-30 1985-01-23 ワイケイケイ株式会社 Lock holder for sliding doors, etc.
JPH0349022Y2 (en) * 1985-05-28 1991-10-18

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4445041A (en) * 1981-06-02 1984-04-24 Hewlett-Packard Company Electron beam blanker
JPS59118679A (en) * 1982-12-23 1984-07-09 三菱電機株式会社 Circular escalator
JPS638039B2 (en) * 1982-12-23 1988-02-19 Mitsubishi Electric Corp
JPS59188480U (en) * 1983-05-30 1984-12-14 明昌特殊産業株式会社 Game machine boarding device
JPH0136546Y2 (en) * 1983-05-30 1989-11-07

Also Published As

Publication number Publication date
JPS5716466B2 (en) 1982-04-05

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