JPS5251873A - Electron beam exposure device - Google Patents

Electron beam exposure device

Info

Publication number
JPS5251873A
JPS5251873A JP12714475A JP12714475A JPS5251873A JP S5251873 A JPS5251873 A JP S5251873A JP 12714475 A JP12714475 A JP 12714475A JP 12714475 A JP12714475 A JP 12714475A JP S5251873 A JPS5251873 A JP S5251873A
Authority
JP
Japan
Prior art keywords
electron beam
exposure device
beam exposure
distortion
beforehand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12714475A
Other languages
Japanese (ja)
Other versions
JPS5823930B2 (en
Inventor
Kouhei Shirota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP12714475A priority Critical patent/JPS5823930B2/en
Publication of JPS5251873A publication Critical patent/JPS5251873A/en
Publication of JPS5823930B2 publication Critical patent/JPS5823930B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To form an image free from distortion on target surface by beforehand correcting the distortion of a projecting mask.
COPYRIGHT: (C)1977,JPO&Japio
JP12714475A 1975-10-22 1975-10-22 Densibee Murokousouchi Expired JPS5823930B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12714475A JPS5823930B2 (en) 1975-10-22 1975-10-22 Densibee Murokousouchi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12714475A JPS5823930B2 (en) 1975-10-22 1975-10-22 Densibee Murokousouchi

Publications (2)

Publication Number Publication Date
JPS5251873A true JPS5251873A (en) 1977-04-26
JPS5823930B2 JPS5823930B2 (en) 1983-05-18

Family

ID=14952696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12714475A Expired JPS5823930B2 (en) 1975-10-22 1975-10-22 Densibee Murokousouchi

Country Status (1)

Country Link
JP (1) JPS5823930B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178726A (en) * 1983-03-29 1984-10-11 Toshiba Corp Manufacture of pattern transfer mask
JPS6124231A (en) * 1984-07-13 1986-02-01 Hitachi Ltd Electron beam patterning device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178726A (en) * 1983-03-29 1984-10-11 Toshiba Corp Manufacture of pattern transfer mask
JPS6124231A (en) * 1984-07-13 1986-02-01 Hitachi Ltd Electron beam patterning device

Also Published As

Publication number Publication date
JPS5823930B2 (en) 1983-05-18

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