JPS5275184A - Fine image forming method - Google Patents

Fine image forming method

Info

Publication number
JPS5275184A
JPS5275184A JP50151327A JP15132775A JPS5275184A JP S5275184 A JPS5275184 A JP S5275184A JP 50151327 A JP50151327 A JP 50151327A JP 15132775 A JP15132775 A JP 15132775A JP S5275184 A JPS5275184 A JP S5275184A
Authority
JP
Japan
Prior art keywords
image forming
forming method
fine image
carbon monoxide
styrene copolymer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50151327A
Other languages
Japanese (ja)
Other versions
JPS5314931B2 (en
Inventor
Wasaburo Kawai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP50151327A priority Critical patent/JPS5275184A/en
Publication of JPS5275184A publication Critical patent/JPS5275184A/en
Publication of JPS5314931B2 publication Critical patent/JPS5314931B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Polyethers (AREA)

Abstract

PURPOSE: To form fine images on a resist material using carbon monoxide-styrene copolymer by radiating an electron beam to the carbon monoxide-styrene copolymer to crosslink and set the exposed part thereof, then selectively removing the unexposed part alone.
COPYRIGHT: (C)1977,JPO&Japio
JP50151327A 1975-12-18 1975-12-18 Fine image forming method Granted JPS5275184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50151327A JPS5275184A (en) 1975-12-18 1975-12-18 Fine image forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50151327A JPS5275184A (en) 1975-12-18 1975-12-18 Fine image forming method

Publications (2)

Publication Number Publication Date
JPS5275184A true JPS5275184A (en) 1977-06-23
JPS5314931B2 JPS5314931B2 (en) 1978-05-20

Family

ID=15516172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50151327A Granted JPS5275184A (en) 1975-12-18 1975-12-18 Fine image forming method

Country Status (1)

Country Link
JP (1) JPS5275184A (en)

Also Published As

Publication number Publication date
JPS5314931B2 (en) 1978-05-20

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