JPS5275184A - Fine image forming method - Google Patents
Fine image forming methodInfo
- Publication number
- JPS5275184A JPS5275184A JP50151327A JP15132775A JPS5275184A JP S5275184 A JPS5275184 A JP S5275184A JP 50151327 A JP50151327 A JP 50151327A JP 15132775 A JP15132775 A JP 15132775A JP S5275184 A JPS5275184 A JP S5275184A
- Authority
- JP
- Japan
- Prior art keywords
- image forming
- forming method
- fine image
- carbon monoxide
- styrene copolymer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Polyethers (AREA)
Abstract
PURPOSE: To form fine images on a resist material using carbon monoxide-styrene copolymer by radiating an electron beam to the carbon monoxide-styrene copolymer to crosslink and set the exposed part thereof, then selectively removing the unexposed part alone.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50151327A JPS5275184A (en) | 1975-12-18 | 1975-12-18 | Fine image forming method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50151327A JPS5275184A (en) | 1975-12-18 | 1975-12-18 | Fine image forming method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5275184A true JPS5275184A (en) | 1977-06-23 |
JPS5314931B2 JPS5314931B2 (en) | 1978-05-20 |
Family
ID=15516172
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50151327A Granted JPS5275184A (en) | 1975-12-18 | 1975-12-18 | Fine image forming method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5275184A (en) |
-
1975
- 1975-12-18 JP JP50151327A patent/JPS5275184A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5314931B2 (en) | 1978-05-20 |
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