JPS5255381A - Photo exposure method - Google Patents
Photo exposure methodInfo
- Publication number
- JPS5255381A JPS5255381A JP50130371A JP13037175A JPS5255381A JP S5255381 A JPS5255381 A JP S5255381A JP 50130371 A JP50130371 A JP 50130371A JP 13037175 A JP13037175 A JP 13037175A JP S5255381 A JPS5255381 A JP S5255381A
- Authority
- JP
- Japan
- Prior art keywords
- exposure method
- resist
- photo exposure
- photo
- resolution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain an exposure method which has no effect on resolution and does not cause delamination of resist or the like by coating a thin film of a high molecular material on a resist film to form a soft contact between photo mask and resist.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50130371A JPS5255381A (en) | 1975-10-31 | 1975-10-31 | Photo exposure method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50130371A JPS5255381A (en) | 1975-10-31 | 1975-10-31 | Photo exposure method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5255381A true JPS5255381A (en) | 1977-05-06 |
Family
ID=15032760
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50130371A Pending JPS5255381A (en) | 1975-10-31 | 1975-10-31 | Photo exposure method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5255381A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59228721A (en) * | 1983-06-09 | 1984-12-22 | Nec Home Electronics Ltd | Manufacture of semiconductor device |
JPS61133940A (en) * | 1984-12-05 | 1986-06-21 | Sumitomo Bakelite Co Ltd | Preparation of plate for printed circuit |
-
1975
- 1975-10-31 JP JP50130371A patent/JPS5255381A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59228721A (en) * | 1983-06-09 | 1984-12-22 | Nec Home Electronics Ltd | Manufacture of semiconductor device |
JPS61133940A (en) * | 1984-12-05 | 1986-06-21 | Sumitomo Bakelite Co Ltd | Preparation of plate for printed circuit |
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