JPS5255381A - Photo exposure method - Google Patents

Photo exposure method

Info

Publication number
JPS5255381A
JPS5255381A JP50130371A JP13037175A JPS5255381A JP S5255381 A JPS5255381 A JP S5255381A JP 50130371 A JP50130371 A JP 50130371A JP 13037175 A JP13037175 A JP 13037175A JP S5255381 A JPS5255381 A JP S5255381A
Authority
JP
Japan
Prior art keywords
exposure method
resist
photo exposure
photo
resolution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50130371A
Other languages
Japanese (ja)
Inventor
Yasuo Matsumoto
Kiyokatsu Jinno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50130371A priority Critical patent/JPS5255381A/en
Publication of JPS5255381A publication Critical patent/JPS5255381A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain an exposure method which has no effect on resolution and does not cause delamination of resist or the like by coating a thin film of a high molecular material on a resist film to form a soft contact between photo mask and resist.
COPYRIGHT: (C)1977,JPO&Japio
JP50130371A 1975-10-31 1975-10-31 Photo exposure method Pending JPS5255381A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50130371A JPS5255381A (en) 1975-10-31 1975-10-31 Photo exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50130371A JPS5255381A (en) 1975-10-31 1975-10-31 Photo exposure method

Publications (1)

Publication Number Publication Date
JPS5255381A true JPS5255381A (en) 1977-05-06

Family

ID=15032760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50130371A Pending JPS5255381A (en) 1975-10-31 1975-10-31 Photo exposure method

Country Status (1)

Country Link
JP (1) JPS5255381A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59228721A (en) * 1983-06-09 1984-12-22 Nec Home Electronics Ltd Manufacture of semiconductor device
JPS61133940A (en) * 1984-12-05 1986-06-21 Sumitomo Bakelite Co Ltd Preparation of plate for printed circuit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59228721A (en) * 1983-06-09 1984-12-22 Nec Home Electronics Ltd Manufacture of semiconductor device
JPS61133940A (en) * 1984-12-05 1986-06-21 Sumitomo Bakelite Co Ltd Preparation of plate for printed circuit

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