JPS53127267A - Inspection method for pattern - Google Patents
Inspection method for patternInfo
- Publication number
- JPS53127267A JPS53127267A JP4288277A JP4288277A JPS53127267A JP S53127267 A JPS53127267 A JP S53127267A JP 4288277 A JP4288277 A JP 4288277A JP 4288277 A JP4288277 A JP 4288277A JP S53127267 A JPS53127267 A JP S53127267A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- inspection method
- evaluate
- quality
- change
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To evaluate the quality of a formed film, by forming a pattern by radiating electron beam and simultaneously monitoring the change in the current flown to the electron ray emission hardening type resist film.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4288277A JPS53127267A (en) | 1977-04-13 | 1977-04-13 | Inspection method for pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4288277A JPS53127267A (en) | 1977-04-13 | 1977-04-13 | Inspection method for pattern |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53127267A true JPS53127267A (en) | 1978-11-07 |
JPS6146965B2 JPS6146965B2 (en) | 1986-10-16 |
Family
ID=12648398
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4288277A Granted JPS53127267A (en) | 1977-04-13 | 1977-04-13 | Inspection method for pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53127267A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59155941A (en) * | 1983-02-25 | 1984-09-05 | Hitachi Ltd | Electron-beam inspection device |
JPS61108145A (en) * | 1984-10-31 | 1986-05-26 | Kazumichi Kimura | Detecting device for detecting semiconductor pellet |
-
1977
- 1977-04-13 JP JP4288277A patent/JPS53127267A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59155941A (en) * | 1983-02-25 | 1984-09-05 | Hitachi Ltd | Electron-beam inspection device |
JPH0563939B2 (en) * | 1983-02-25 | 1993-09-13 | Hitachi Ltd | |
JPS61108145A (en) * | 1984-10-31 | 1986-05-26 | Kazumichi Kimura | Detecting device for detecting semiconductor pellet |
Also Published As
Publication number | Publication date |
---|---|
JPS6146965B2 (en) | 1986-10-16 |
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