JPS5349957A - Focusing method for electronic beam exposure device - Google Patents
Focusing method for electronic beam exposure deviceInfo
- Publication number
- JPS5349957A JPS5349957A JP12471876A JP12471876A JPS5349957A JP S5349957 A JPS5349957 A JP S5349957A JP 12471876 A JP12471876 A JP 12471876A JP 12471876 A JP12471876 A JP 12471876A JP S5349957 A JPS5349957 A JP S5349957A
- Authority
- JP
- Japan
- Prior art keywords
- electronic beam
- exposure device
- beam exposure
- focusing method
- electronic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To ensure an easy and accurate focusing for the electronic beam by condensing and scanning the electronic beam on the first iris diaphragm.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12471876A JPS5349957A (en) | 1976-10-18 | 1976-10-18 | Focusing method for electronic beam exposure device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12471876A JPS5349957A (en) | 1976-10-18 | 1976-10-18 | Focusing method for electronic beam exposure device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5349957A true JPS5349957A (en) | 1978-05-06 |
JPS5339749B2 JPS5339749B2 (en) | 1978-10-23 |
Family
ID=14892375
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12471876A Granted JPS5349957A (en) | 1976-10-18 | 1976-10-18 | Focusing method for electronic beam exposure device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5349957A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4684809A (en) * | 1984-09-29 | 1987-08-04 | Kabushiki Kaisha Toshiba | Method of adjusting optical column in energy beam exposure system |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS571713Y2 (en) * | 1978-06-15 | 1982-01-12 |
-
1976
- 1976-10-18 JP JP12471876A patent/JPS5349957A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4684809A (en) * | 1984-09-29 | 1987-08-04 | Kabushiki Kaisha Toshiba | Method of adjusting optical column in energy beam exposure system |
Also Published As
Publication number | Publication date |
---|---|
JPS5339749B2 (en) | 1978-10-23 |
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