JPS5349957A - Focusing method for electronic beam exposure device - Google Patents

Focusing method for electronic beam exposure device

Info

Publication number
JPS5349957A
JPS5349957A JP12471876A JP12471876A JPS5349957A JP S5349957 A JPS5349957 A JP S5349957A JP 12471876 A JP12471876 A JP 12471876A JP 12471876 A JP12471876 A JP 12471876A JP S5349957 A JPS5349957 A JP S5349957A
Authority
JP
Japan
Prior art keywords
electronic beam
exposure device
beam exposure
focusing method
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12471876A
Other languages
Japanese (ja)
Other versions
JPS5339749B2 (en
Inventor
Moritaka Nakamura
Yasutaka Ban
Haruo Tsuchikawa
Hiroshi Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12471876A priority Critical patent/JPS5349957A/en
Publication of JPS5349957A publication Critical patent/JPS5349957A/en
Publication of JPS5339749B2 publication Critical patent/JPS5339749B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To ensure an easy and accurate focusing for the electronic beam by condensing and scanning the electronic beam on the first iris diaphragm.
COPYRIGHT: (C)1978,JPO&Japio
JP12471876A 1976-10-18 1976-10-18 Focusing method for electronic beam exposure device Granted JPS5349957A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12471876A JPS5349957A (en) 1976-10-18 1976-10-18 Focusing method for electronic beam exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12471876A JPS5349957A (en) 1976-10-18 1976-10-18 Focusing method for electronic beam exposure device

Publications (2)

Publication Number Publication Date
JPS5349957A true JPS5349957A (en) 1978-05-06
JPS5339749B2 JPS5339749B2 (en) 1978-10-23

Family

ID=14892375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12471876A Granted JPS5349957A (en) 1976-10-18 1976-10-18 Focusing method for electronic beam exposure device

Country Status (1)

Country Link
JP (1) JPS5349957A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4684809A (en) * 1984-09-29 1987-08-04 Kabushiki Kaisha Toshiba Method of adjusting optical column in energy beam exposure system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS571713Y2 (en) * 1978-06-15 1982-01-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4684809A (en) * 1984-09-29 1987-08-04 Kabushiki Kaisha Toshiba Method of adjusting optical column in energy beam exposure system

Also Published As

Publication number Publication date
JPS5339749B2 (en) 1978-10-23

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