JPS5397366A - Electron beam focusing device - Google Patents

Electron beam focusing device

Info

Publication number
JPS5397366A
JPS5397366A JP1165577A JP1165577A JPS5397366A JP S5397366 A JPS5397366 A JP S5397366A JP 1165577 A JP1165577 A JP 1165577A JP 1165577 A JP1165577 A JP 1165577A JP S5397366 A JPS5397366 A JP S5397366A
Authority
JP
Japan
Prior art keywords
electron beam
focusing device
beam focusing
contamination
prevent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1165577A
Other languages
Japanese (ja)
Other versions
JPS598024B2 (en
Inventor
Naotake Saito
Yoshihisa Namikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1165577A priority Critical patent/JPS598024B2/en
Publication of JPS5397366A publication Critical patent/JPS5397366A/en
Publication of JPS598024B2 publication Critical patent/JPS598024B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To obtain an electron beam stop device which can prevent the contamination of the iris diaphragm.
COPYRIGHT: (C)1978,JPO&Japio
JP1165577A 1977-02-07 1977-02-07 Electron beam aperture device Expired JPS598024B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1165577A JPS598024B2 (en) 1977-02-07 1977-02-07 Electron beam aperture device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1165577A JPS598024B2 (en) 1977-02-07 1977-02-07 Electron beam aperture device

Publications (2)

Publication Number Publication Date
JPS5397366A true JPS5397366A (en) 1978-08-25
JPS598024B2 JPS598024B2 (en) 1984-02-22

Family

ID=11783972

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1165577A Expired JPS598024B2 (en) 1977-02-07 1977-02-07 Electron beam aperture device

Country Status (1)

Country Link
JP (1) JPS598024B2 (en)

Also Published As

Publication number Publication date
JPS598024B2 (en) 1984-02-22

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