JPS5430773A - Electron-beam device having vacuum isolation film inside sample chamber - Google Patents
Electron-beam device having vacuum isolation film inside sample chamberInfo
- Publication number
- JPS5430773A JPS5430773A JP9600877A JP9600877A JPS5430773A JP S5430773 A JPS5430773 A JP S5430773A JP 9600877 A JP9600877 A JP 9600877A JP 9600877 A JP9600877 A JP 9600877A JP S5430773 A JPS5430773 A JP S5430773A
- Authority
- JP
- Japan
- Prior art keywords
- electron
- beam device
- sample chamber
- isolation film
- film inside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make it possible to produce low vacuum at a fixing part and to prevent to prevent a sample mounted on a moving table from being contaminated by vacuum-separating the fixing part of the sample chamber constituting an electron-beam device from the moving table on which a sample is mounted by using an expansible airtight insulation film.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9600877A JPS5430773A (en) | 1977-08-12 | 1977-08-12 | Electron-beam device having vacuum isolation film inside sample chamber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9600877A JPS5430773A (en) | 1977-08-12 | 1977-08-12 | Electron-beam device having vacuum isolation film inside sample chamber |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5430773A true JPS5430773A (en) | 1979-03-07 |
Family
ID=14153141
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9600877A Pending JPS5430773A (en) | 1977-08-12 | 1977-08-12 | Electron-beam device having vacuum isolation film inside sample chamber |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5430773A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006202654A (en) * | 2005-01-21 | 2006-08-03 | Horon:Kk | Stage |
JP2012064567A (en) * | 2010-08-03 | 2012-03-29 | Ebara Corp | Electron beam inspection device having foreign substance attachment prevention function, and method |
-
1977
- 1977-08-12 JP JP9600877A patent/JPS5430773A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006202654A (en) * | 2005-01-21 | 2006-08-03 | Horon:Kk | Stage |
JP2012064567A (en) * | 2010-08-03 | 2012-03-29 | Ebara Corp | Electron beam inspection device having foreign substance attachment prevention function, and method |
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