JPS5420657A - Sample processor for scanning electron microscope and its similar device - Google Patents
Sample processor for scanning electron microscope and its similar deviceInfo
- Publication number
- JPS5420657A JPS5420657A JP8510477A JP8510477A JPS5420657A JP S5420657 A JPS5420657 A JP S5420657A JP 8510477 A JP8510477 A JP 8510477A JP 8510477 A JP8510477 A JP 8510477A JP S5420657 A JPS5420657 A JP S5420657A
- Authority
- JP
- Japan
- Prior art keywords
- electron microscope
- scanning electron
- similar device
- sample processor
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make it possible to manufacture and process a sample easily, by providing a sample processor independently of a standby exhaust chamber.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8510477A JPS5420657A (en) | 1977-07-18 | 1977-07-18 | Sample processor for scanning electron microscope and its similar device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8510477A JPS5420657A (en) | 1977-07-18 | 1977-07-18 | Sample processor for scanning electron microscope and its similar device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5420657A true JPS5420657A (en) | 1979-02-16 |
Family
ID=13849296
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8510477A Pending JPS5420657A (en) | 1977-07-18 | 1977-07-18 | Sample processor for scanning electron microscope and its similar device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5420657A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58146346U (en) * | 1982-03-26 | 1983-10-01 | 日本電子株式会社 | Sample exchange equipment for scanning electron microscopes, etc. |
JPS61162939U (en) * | 1985-03-29 | 1986-10-08 | ||
WO2014069325A1 (en) * | 2012-10-31 | 2014-05-08 | 株式会社日立ハイテクノロジーズ | Electron beam microscope apparatus |
-
1977
- 1977-07-18 JP JP8510477A patent/JPS5420657A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58146346U (en) * | 1982-03-26 | 1983-10-01 | 日本電子株式会社 | Sample exchange equipment for scanning electron microscopes, etc. |
JPS61162939U (en) * | 1985-03-29 | 1986-10-08 | ||
WO2014069325A1 (en) * | 2012-10-31 | 2014-05-08 | 株式会社日立ハイテクノロジーズ | Electron beam microscope apparatus |
JP2014089936A (en) * | 2012-10-31 | 2014-05-15 | Hitachi High-Technologies Corp | Electron beam microscopic device |
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