JPS53129975A - Electron beam exposure apparatus - Google Patents
Electron beam exposure apparatusInfo
- Publication number
- JPS53129975A JPS53129975A JP4499877A JP4499877A JPS53129975A JP S53129975 A JPS53129975 A JP S53129975A JP 4499877 A JP4499877 A JP 4499877A JP 4499877 A JP4499877 A JP 4499877A JP S53129975 A JPS53129975 A JP S53129975A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- exposure apparatus
- beam exposure
- sanning
- speeds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To obtain an electron beam exposure apparatus which is capable of performing half-tone exposure and is varying sanning speeds and yet is easy to handle and is inexpensive.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4499877A JPS53129975A (en) | 1977-04-19 | 1977-04-19 | Electron beam exposure apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4499877A JPS53129975A (en) | 1977-04-19 | 1977-04-19 | Electron beam exposure apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53129975A true JPS53129975A (en) | 1978-11-13 |
JPS548072B2 JPS548072B2 (en) | 1979-04-12 |
Family
ID=12707083
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4499877A Granted JPS53129975A (en) | 1977-04-19 | 1977-04-19 | Electron beam exposure apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53129975A (en) |
-
1977
- 1977-04-19 JP JP4499877A patent/JPS53129975A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS548072B2 (en) | 1979-04-12 |
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