JPS5298474A - Vapor phase growth under reduced pressure - Google Patents

Vapor phase growth under reduced pressure

Info

Publication number
JPS5298474A
JPS5298474A JP1402976A JP1402976A JPS5298474A JP S5298474 A JPS5298474 A JP S5298474A JP 1402976 A JP1402976 A JP 1402976A JP 1402976 A JP1402976 A JP 1402976A JP S5298474 A JPS5298474 A JP S5298474A
Authority
JP
Japan
Prior art keywords
reduced pressure
under reduced
vapor phase
phase growth
growth under
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1402976A
Other languages
Japanese (ja)
Inventor
Akira Shintani
Masahiko Kogirima
Yoichi Tamaoki
Michio Suzuki
Michiyoshi Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1402976A priority Critical patent/JPS5298474A/en
Publication of JPS5298474A publication Critical patent/JPS5298474A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To produce an insulator film of a uniform thickness by making the spacing between reaction tube walls and specimen wafer within 5 mm.
COPYRIGHT: (C)1977,JPO&Japio
JP1402976A 1976-02-13 1976-02-13 Vapor phase growth under reduced pressure Pending JPS5298474A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1402976A JPS5298474A (en) 1976-02-13 1976-02-13 Vapor phase growth under reduced pressure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1402976A JPS5298474A (en) 1976-02-13 1976-02-13 Vapor phase growth under reduced pressure

Publications (1)

Publication Number Publication Date
JPS5298474A true JPS5298474A (en) 1977-08-18

Family

ID=11849727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1402976A Pending JPS5298474A (en) 1976-02-13 1976-02-13 Vapor phase growth under reduced pressure

Country Status (1)

Country Link
JP (1) JPS5298474A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5753942A (en) * 1980-09-17 1982-03-31 Semiconductor Res Found Method of oxidation and diffusion
JPS57202741A (en) * 1981-06-05 1982-12-11 Mitsubishi Electric Corp Manufacture of surface protection film for semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5753942A (en) * 1980-09-17 1982-03-31 Semiconductor Res Found Method of oxidation and diffusion
JPS6366050B2 (en) * 1980-09-17 1988-12-19 Handotai Kenkyu Shinkokai
JPS57202741A (en) * 1981-06-05 1982-12-11 Mitsubishi Electric Corp Manufacture of surface protection film for semiconductor device

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