JPS5357762A - Diaphragm for electron beam exposure apparatus - Google Patents

Diaphragm for electron beam exposure apparatus

Info

Publication number
JPS5357762A
JPS5357762A JP13261676A JP13261676A JPS5357762A JP S5357762 A JPS5357762 A JP S5357762A JP 13261676 A JP13261676 A JP 13261676A JP 13261676 A JP13261676 A JP 13261676A JP S5357762 A JPS5357762 A JP S5357762A
Authority
JP
Japan
Prior art keywords
diaphragm
electron beam
exposure apparatus
beam exposure
single crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13261676A
Other languages
Japanese (ja)
Inventor
Junji Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13261676A priority Critical patent/JPS5357762A/en
Publication of JPS5357762A publication Critical patent/JPS5357762A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To obtain a diaphragm having opening end parts of superior linearity by making use of the cleavage surfaces of single crystal.
COPYRIGHT: (C)1978,JPO&Japio
JP13261676A 1976-11-04 1976-11-04 Diaphragm for electron beam exposure apparatus Pending JPS5357762A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13261676A JPS5357762A (en) 1976-11-04 1976-11-04 Diaphragm for electron beam exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13261676A JPS5357762A (en) 1976-11-04 1976-11-04 Diaphragm for electron beam exposure apparatus

Publications (1)

Publication Number Publication Date
JPS5357762A true JPS5357762A (en) 1978-05-25

Family

ID=15085484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13261676A Pending JPS5357762A (en) 1976-11-04 1976-11-04 Diaphragm for electron beam exposure apparatus

Country Status (1)

Country Link
JP (1) JPS5357762A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752133A (en) * 1980-09-16 1982-03-27 Toshiba Corp Electron beam exposure apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752133A (en) * 1980-09-16 1982-03-27 Toshiba Corp Electron beam exposure apparatus
JPS622454B2 (en) * 1980-09-16 1987-01-20 Tokyo Shibaura Electric Co

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