JPS54874A - Etching monitor system - Google Patents

Etching monitor system

Info

Publication number
JPS54874A
JPS54874A JP6545277A JP6545277A JPS54874A JP S54874 A JPS54874 A JP S54874A JP 6545277 A JP6545277 A JP 6545277A JP 6545277 A JP6545277 A JP 6545277A JP S54874 A JPS54874 A JP S54874A
Authority
JP
Japan
Prior art keywords
monitor system
etching monitor
thin film
etching
seucre
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6545277A
Other languages
Japanese (ja)
Other versions
JPS5637696B2 (en
Inventor
Shunji Kashiwagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6545277A priority Critical patent/JPS54874A/en
Publication of JPS54874A publication Critical patent/JPS54874A/en
Publication of JPS5637696B2 publication Critical patent/JPS5637696B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To seucre a high-accuracy decision for the etching end point of the Si3N4 thin film by utilizing the optical properties of the thin film.
COPYRIGHT: (C)1979,JPO&Japio
JP6545277A 1977-06-03 1977-06-03 Etching monitor system Granted JPS54874A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6545277A JPS54874A (en) 1977-06-03 1977-06-03 Etching monitor system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6545277A JPS54874A (en) 1977-06-03 1977-06-03 Etching monitor system

Publications (2)

Publication Number Publication Date
JPS54874A true JPS54874A (en) 1979-01-06
JPS5637696B2 JPS5637696B2 (en) 1981-09-02

Family

ID=13287538

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6545277A Granted JPS54874A (en) 1977-06-03 1977-06-03 Etching monitor system

Country Status (1)

Country Link
JP (1) JPS54874A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61179291U (en) * 1985-04-30 1986-11-08

Also Published As

Publication number Publication date
JPS5637696B2 (en) 1981-09-02

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