JPS5332677A - Electron beam exposure apparatus - Google Patents

Electron beam exposure apparatus

Info

Publication number
JPS5332677A
JPS5332677A JP10663676A JP10663676A JPS5332677A JP S5332677 A JPS5332677 A JP S5332677A JP 10663676 A JP10663676 A JP 10663676A JP 10663676 A JP10663676 A JP 10663676A JP S5332677 A JPS5332677 A JP S5332677A
Authority
JP
Japan
Prior art keywords
electron beam
exposure apparatus
beam exposure
exposure
covering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10663676A
Other languages
Japanese (ja)
Inventor
Mamoru Nakasuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10663676A priority Critical patent/JPS5332677A/en
Publication of JPS5332677A publication Critical patent/JPS5332677A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To perform desired exposure satisfactorily by covering the exposure room surfaces opposing to the exposed surface of a sample with Al, Si or the like.
COPYRIGHT: (C)1978,JPO&Japio
JP10663676A 1976-09-08 1976-09-08 Electron beam exposure apparatus Pending JPS5332677A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10663676A JPS5332677A (en) 1976-09-08 1976-09-08 Electron beam exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10663676A JPS5332677A (en) 1976-09-08 1976-09-08 Electron beam exposure apparatus

Publications (1)

Publication Number Publication Date
JPS5332677A true JPS5332677A (en) 1978-03-28

Family

ID=14438591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10663676A Pending JPS5332677A (en) 1976-09-08 1976-09-08 Electron beam exposure apparatus

Country Status (1)

Country Link
JP (1) JPS5332677A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5835921A (en) * 1981-08-28 1983-03-02 Toshiba Corp Electron beam drawing device
JPS58130522A (en) * 1982-01-28 1983-08-04 Toshiba Corp Electron beam exposure device
JPS58223323A (en) * 1982-06-22 1983-12-24 Toshiba Corp Electron-beam drawing device
JPH05258668A (en) * 1992-01-27 1993-10-08 Thomson Consumer Electron Inc Method for electrophotographically forming light emitting screen structure on inner surface of crt face plate panel

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5835921A (en) * 1981-08-28 1983-03-02 Toshiba Corp Electron beam drawing device
JPS58130522A (en) * 1982-01-28 1983-08-04 Toshiba Corp Electron beam exposure device
JPS58223323A (en) * 1982-06-22 1983-12-24 Toshiba Corp Electron-beam drawing device
JPH0415609B2 (en) * 1982-06-22 1992-03-18 Tokyo Shibaura Electric Co
JPH05258668A (en) * 1992-01-27 1993-10-08 Thomson Consumer Electron Inc Method for electrophotographically forming light emitting screen structure on inner surface of crt face plate panel

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