JPS52119184A - Electron beam exposing method - Google Patents

Electron beam exposing method

Info

Publication number
JPS52119184A
JPS52119184A JP3647276A JP3647276A JPS52119184A JP S52119184 A JPS52119184 A JP S52119184A JP 3647276 A JP3647276 A JP 3647276A JP 3647276 A JP3647276 A JP 3647276A JP S52119184 A JPS52119184 A JP S52119184A
Authority
JP
Japan
Prior art keywords
electron beam
exposing method
beam exposing
square
arrengements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3647276A
Other languages
Japanese (ja)
Inventor
Hiroshi Yasuda
Haruo Tsuchikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3647276A priority Critical patent/JPS52119184A/en
Publication of JPS52119184A publication Critical patent/JPS52119184A/en
Pending legal-status Critical Current

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  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To obtain the fine pattern by facilitating the arrengements of the first and the second irises with the square aperture varying the thickness of square electron beam.
COPYRIGHT: (C)1977,JPO&Japio
JP3647276A 1976-03-31 1976-03-31 Electron beam exposing method Pending JPS52119184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3647276A JPS52119184A (en) 1976-03-31 1976-03-31 Electron beam exposing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3647276A JPS52119184A (en) 1976-03-31 1976-03-31 Electron beam exposing method

Publications (1)

Publication Number Publication Date
JPS52119184A true JPS52119184A (en) 1977-10-06

Family

ID=12470747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3647276A Pending JPS52119184A (en) 1976-03-31 1976-03-31 Electron beam exposing method

Country Status (1)

Country Link
JP (1) JPS52119184A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59169132A (en) * 1983-03-16 1984-09-25 Hitachi Ltd Drawing device by electron beam

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59169132A (en) * 1983-03-16 1984-09-25 Hitachi Ltd Drawing device by electron beam

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