JPS52120682A - Gas phase growth method - Google Patents
Gas phase growth methodInfo
- Publication number
- JPS52120682A JPS52120682A JP3614176A JP3614176A JPS52120682A JP S52120682 A JPS52120682 A JP S52120682A JP 3614176 A JP3614176 A JP 3614176A JP 3614176 A JP3614176 A JP 3614176A JP S52120682 A JPS52120682 A JP S52120682A
- Authority
- JP
- Japan
- Prior art keywords
- gas phase
- phase growth
- growth method
- unifrom
- spacer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE: To make the unifrom thin film the gas phase growth, by using the spacer which is close to the interior wall of the reaction tube, and whose diameter of the middle part is smaller than that of both the end parts.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3614176A JPS52120682A (en) | 1976-04-02 | 1976-04-02 | Gas phase growth method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3614176A JPS52120682A (en) | 1976-04-02 | 1976-04-02 | Gas phase growth method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52120682A true JPS52120682A (en) | 1977-10-11 |
JPS5436063B2 JPS5436063B2 (en) | 1979-11-07 |
Family
ID=12461498
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3614176A Granted JPS52120682A (en) | 1976-04-02 | 1976-04-02 | Gas phase growth method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52120682A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6057125U (en) * | 1983-09-28 | 1985-04-20 | 富士通株式会社 | Semiconductor vapor phase growth equipment |
JPH01310054A (en) * | 1988-06-04 | 1989-12-14 | Ig Tech Res Inc | Panel for construction |
-
1976
- 1976-04-02 JP JP3614176A patent/JPS52120682A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6057125U (en) * | 1983-09-28 | 1985-04-20 | 富士通株式会社 | Semiconductor vapor phase growth equipment |
JPH01310054A (en) * | 1988-06-04 | 1989-12-14 | Ig Tech Res Inc | Panel for construction |
Also Published As
Publication number | Publication date |
---|---|
JPS5436063B2 (en) | 1979-11-07 |
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