JPS52127167A - Etching method - Google Patents

Etching method

Info

Publication number
JPS52127167A
JPS52127167A JP4364576A JP4364576A JPS52127167A JP S52127167 A JPS52127167 A JP S52127167A JP 4364576 A JP4364576 A JP 4364576A JP 4364576 A JP4364576 A JP 4364576A JP S52127167 A JPS52127167 A JP S52127167A
Authority
JP
Japan
Prior art keywords
etching method
etching
halogenide
halogen
compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4364576A
Other languages
Japanese (ja)
Inventor
Masanao Itoga
Minoru Inoue
Moritaka Nakamura
Katsuhiro Fujino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4364576A priority Critical patent/JPS52127167A/en
Publication of JPS52127167A publication Critical patent/JPS52127167A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To increase speed of etching and to provide selectivity by using halogen, halogenide or other compound with these for sealing gas into the ion beam etching unit.
COPYRIGHT: (C)1977,JPO&Japio
JP4364576A 1976-04-19 1976-04-19 Etching method Pending JPS52127167A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4364576A JPS52127167A (en) 1976-04-19 1976-04-19 Etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4364576A JPS52127167A (en) 1976-04-19 1976-04-19 Etching method

Publications (1)

Publication Number Publication Date
JPS52127167A true JPS52127167A (en) 1977-10-25

Family

ID=12669592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4364576A Pending JPS52127167A (en) 1976-04-19 1976-04-19 Etching method

Country Status (1)

Country Link
JP (1) JPS52127167A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54102872A (en) * 1978-01-30 1979-08-13 Toshiba Corp Ion etching method
JPS58225637A (en) * 1982-06-23 1983-12-27 Sony Corp Ion beam apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54102872A (en) * 1978-01-30 1979-08-13 Toshiba Corp Ion etching method
JPS6228574B2 (en) * 1978-01-30 1987-06-22 Tokyo Shibaura Electric Co
JPS58225637A (en) * 1982-06-23 1983-12-27 Sony Corp Ion beam apparatus
JPH0481325B2 (en) * 1982-06-23 1992-12-22 Sony Corp

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