JPS5287986A - Etching method - Google Patents
Etching methodInfo
- Publication number
- JPS5287986A JPS5287986A JP474176A JP474176A JPS5287986A JP S5287986 A JPS5287986 A JP S5287986A JP 474176 A JP474176 A JP 474176A JP 474176 A JP474176 A JP 474176A JP S5287986 A JPS5287986 A JP S5287986A
- Authority
- JP
- Japan
- Prior art keywords
- etching method
- etching
- atomosphere
- accelerate
- deterioration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To accelerate the rate of etching and prevent the deterioration of a resist material by performing plasma etching in the atomosphere of mixed gas of halogen alone or its compound and NO.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP474176A JPS6046538B2 (en) | 1976-01-19 | 1976-01-19 | Etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP474176A JPS6046538B2 (en) | 1976-01-19 | 1976-01-19 | Etching method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5287986A true JPS5287986A (en) | 1977-07-22 |
JPS6046538B2 JPS6046538B2 (en) | 1985-10-16 |
Family
ID=11592329
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP474176A Expired JPS6046538B2 (en) | 1976-01-19 | 1976-01-19 | Etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6046538B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53146939A (en) * | 1977-05-27 | 1978-12-21 | Hitachi Ltd | Etching method for aluminum |
-
1976
- 1976-01-19 JP JP474176A patent/JPS6046538B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53146939A (en) * | 1977-05-27 | 1978-12-21 | Hitachi Ltd | Etching method for aluminum |
JPS5730292B2 (en) * | 1977-05-27 | 1982-06-28 |
Also Published As
Publication number | Publication date |
---|---|
JPS6046538B2 (en) | 1985-10-16 |
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