JPS5287986A - Etching method - Google Patents

Etching method

Info

Publication number
JPS5287986A
JPS5287986A JP474176A JP474176A JPS5287986A JP S5287986 A JPS5287986 A JP S5287986A JP 474176 A JP474176 A JP 474176A JP 474176 A JP474176 A JP 474176A JP S5287986 A JPS5287986 A JP S5287986A
Authority
JP
Japan
Prior art keywords
etching method
etching
atomosphere
accelerate
deterioration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP474176A
Other languages
Japanese (ja)
Other versions
JPS6046538B2 (en
Inventor
Kazushi Nagata
Kazuto Suehiro
Shigeji Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP474176A priority Critical patent/JPS6046538B2/en
Publication of JPS5287986A publication Critical patent/JPS5287986A/en
Publication of JPS6046538B2 publication Critical patent/JPS6046538B2/en
Expired legal-status Critical Current

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  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To accelerate the rate of etching and prevent the deterioration of a resist material by performing plasma etching in the atomosphere of mixed gas of halogen alone or its compound and NO.
COPYRIGHT: (C)1977,JPO&Japio
JP474176A 1976-01-19 1976-01-19 Etching method Expired JPS6046538B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP474176A JPS6046538B2 (en) 1976-01-19 1976-01-19 Etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP474176A JPS6046538B2 (en) 1976-01-19 1976-01-19 Etching method

Publications (2)

Publication Number Publication Date
JPS5287986A true JPS5287986A (en) 1977-07-22
JPS6046538B2 JPS6046538B2 (en) 1985-10-16

Family

ID=11592329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP474176A Expired JPS6046538B2 (en) 1976-01-19 1976-01-19 Etching method

Country Status (1)

Country Link
JP (1) JPS6046538B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53146939A (en) * 1977-05-27 1978-12-21 Hitachi Ltd Etching method for aluminum

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53146939A (en) * 1977-05-27 1978-12-21 Hitachi Ltd Etching method for aluminum
JPS5730292B2 (en) * 1977-05-27 1982-06-28

Also Published As

Publication number Publication date
JPS6046538B2 (en) 1985-10-16

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