JPS5314571A - Etching method and mixed gas for etching - Google Patents

Etching method and mixed gas for etching

Info

Publication number
JPS5314571A
JPS5314571A JP8939876A JP8939876A JPS5314571A JP S5314571 A JPS5314571 A JP S5314571A JP 8939876 A JP8939876 A JP 8939876A JP 8939876 A JP8939876 A JP 8939876A JP S5314571 A JPS5314571 A JP S5314571A
Authority
JP
Japan
Prior art keywords
etching
mixed gas
etching method
gas
mole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8939876A
Other languages
Japanese (ja)
Other versions
JPS6019139B2 (en
Inventor
Kazushi Nagata
Kazuto Suehiro
Shigeji Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP51089398A priority Critical patent/JPS6019139B2/en
Publication of JPS5314571A publication Critical patent/JPS5314571A/en
Publication of JPS6019139B2 publication Critical patent/JPS6019139B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To improve plasma etching rate and prevent the degradation of organic resist materials by using the gas comprising mixing of 1 to 10 mole % of CO2 into halogen alone or its compound gas.
COPYRIGHT: (C)1978,JPO&Japio
JP51089398A 1976-07-26 1976-07-26 Etching method and mixture gas for plasma etching Expired JPS6019139B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51089398A JPS6019139B2 (en) 1976-07-26 1976-07-26 Etching method and mixture gas for plasma etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51089398A JPS6019139B2 (en) 1976-07-26 1976-07-26 Etching method and mixture gas for plasma etching

Publications (2)

Publication Number Publication Date
JPS5314571A true JPS5314571A (en) 1978-02-09
JPS6019139B2 JPS6019139B2 (en) 1985-05-14

Family

ID=13969531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51089398A Expired JPS6019139B2 (en) 1976-07-26 1976-07-26 Etching method and mixture gas for plasma etching

Country Status (1)

Country Link
JP (1) JPS6019139B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752136A (en) * 1980-07-11 1982-03-27 Philips Nv Method of producing semiconductor device
US4381967A (en) * 1980-07-11 1983-05-03 U.S. Philips Corporation Method of manufacturing a semiconductor device
JPS61256638A (en) * 1985-05-03 1986-11-14 テキサス　インスツルメンツ　インコーポレイテッド Patternization of thin film wiring layer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5122637A (en) * 1974-08-20 1976-02-23 Fujitsu Ltd Kinzokuhimakuno etsuchinguhoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5122637A (en) * 1974-08-20 1976-02-23 Fujitsu Ltd Kinzokuhimakuno etsuchinguhoho

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752136A (en) * 1980-07-11 1982-03-27 Philips Nv Method of producing semiconductor device
US4381967A (en) * 1980-07-11 1983-05-03 U.S. Philips Corporation Method of manufacturing a semiconductor device
JPH0237091B2 (en) * 1980-07-11 1990-08-22 Fuiritsupusu Furuuiranpenfuaburiken Nv
JPS61256638A (en) * 1985-05-03 1986-11-14 テキサス　インスツルメンツ　インコーポレイテッド Patternization of thin film wiring layer

Also Published As

Publication number Publication date
JPS6019139B2 (en) 1985-05-14

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