JPS53145574A - Oxidation method of silicon wafers - Google Patents
Oxidation method of silicon wafersInfo
- Publication number
- JPS53145574A JPS53145574A JP6142877A JP6142877A JPS53145574A JP S53145574 A JPS53145574 A JP S53145574A JP 6142877 A JP6142877 A JP 6142877A JP 6142877 A JP6142877 A JP 6142877A JP S53145574 A JPS53145574 A JP S53145574A
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafers
- oxidation method
- rate
- mixing
- oxygen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To shorten required oxidation time while maintaining effect by increasing the rate of mixing of chlorine compound to oxygen as much as possible and changing the rate of mixing and the rate of oxide film forming.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6142877A JPS5941301B2 (en) | 1977-05-25 | 1977-05-25 | Silicon wafer oxidation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6142877A JPS5941301B2 (en) | 1977-05-25 | 1977-05-25 | Silicon wafer oxidation method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53145574A true JPS53145574A (en) | 1978-12-18 |
JPS5941301B2 JPS5941301B2 (en) | 1984-10-05 |
Family
ID=13170778
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6142877A Expired JPS5941301B2 (en) | 1977-05-25 | 1977-05-25 | Silicon wafer oxidation method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5941301B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000091577A (en) * | 1998-08-26 | 2000-03-31 | Texas Instr Inc <Ti> | Method of forming game oxide film |
-
1977
- 1977-05-25 JP JP6142877A patent/JPS5941301B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000091577A (en) * | 1998-08-26 | 2000-03-31 | Texas Instr Inc <Ti> | Method of forming game oxide film |
Also Published As
Publication number | Publication date |
---|---|
JPS5941301B2 (en) | 1984-10-05 |
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