JPS53112668A - Preparing method for oxide film - Google Patents

Preparing method for oxide film

Info

Publication number
JPS53112668A
JPS53112668A JP2821677A JP2821677A JPS53112668A JP S53112668 A JPS53112668 A JP S53112668A JP 2821677 A JP2821677 A JP 2821677A JP 2821677 A JP2821677 A JP 2821677A JP S53112668 A JPS53112668 A JP S53112668A
Authority
JP
Japan
Prior art keywords
oxide film
preparing method
introducing
substrate
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2821677A
Other languages
Japanese (ja)
Inventor
Akira Nishimoto
Natsuo Tsubouchi
Yumiko Takeda
Haruhiko Abe
Hirokazu Miyoshi
Yoshihiko Watari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2821677A priority Critical patent/JPS53112668A/en
Publication of JPS53112668A publication Critical patent/JPS53112668A/en
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To selectively form oxide thick and thin film at a low temperature, by introducing P, As, Sb or the like on Si substrate with a high concentration, and performing oxidation under a pressure of 6.1kg/cm2.
COPYRIGHT: (C)1978,JPO&Japio
JP2821677A 1977-03-14 1977-03-14 Preparing method for oxide film Pending JPS53112668A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2821677A JPS53112668A (en) 1977-03-14 1977-03-14 Preparing method for oxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2821677A JPS53112668A (en) 1977-03-14 1977-03-14 Preparing method for oxide film

Publications (1)

Publication Number Publication Date
JPS53112668A true JPS53112668A (en) 1978-10-02

Family

ID=12242428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2821677A Pending JPS53112668A (en) 1977-03-14 1977-03-14 Preparing method for oxide film

Country Status (1)

Country Link
JP (1) JPS53112668A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0370125A (en) * 1989-08-10 1991-03-26 Toshiba Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0370125A (en) * 1989-08-10 1991-03-26 Toshiba Corp Manufacture of semiconductor device

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