JPS53112668A - Preparing method for oxide film - Google Patents
Preparing method for oxide filmInfo
- Publication number
- JPS53112668A JPS53112668A JP2821677A JP2821677A JPS53112668A JP S53112668 A JPS53112668 A JP S53112668A JP 2821677 A JP2821677 A JP 2821677A JP 2821677 A JP2821677 A JP 2821677A JP S53112668 A JPS53112668 A JP S53112668A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- preparing method
- introducing
- substrate
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To selectively form oxide thick and thin film at a low temperature, by introducing P, As, Sb or the like on Si substrate with a high concentration, and performing oxidation under a pressure of 6.1kg/cm2.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2821677A JPS53112668A (en) | 1977-03-14 | 1977-03-14 | Preparing method for oxide film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2821677A JPS53112668A (en) | 1977-03-14 | 1977-03-14 | Preparing method for oxide film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53112668A true JPS53112668A (en) | 1978-10-02 |
Family
ID=12242428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2821677A Pending JPS53112668A (en) | 1977-03-14 | 1977-03-14 | Preparing method for oxide film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53112668A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0370125A (en) * | 1989-08-10 | 1991-03-26 | Toshiba Corp | Manufacture of semiconductor device |
-
1977
- 1977-03-14 JP JP2821677A patent/JPS53112668A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0370125A (en) * | 1989-08-10 | 1991-03-26 | Toshiba Corp | Manufacture of semiconductor device |
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