JPS5375853A - Measuring method for specific resistance - Google Patents

Measuring method for specific resistance

Info

Publication number
JPS5375853A
JPS5375853A JP15091676A JP15091676A JPS5375853A JP S5375853 A JPS5375853 A JP S5375853A JP 15091676 A JP15091676 A JP 15091676A JP 15091676 A JP15091676 A JP 15091676A JP S5375853 A JPS5375853 A JP S5375853A
Authority
JP
Japan
Prior art keywords
specific resistance
measuring method
measure
high accuracy
epitaxially grown
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15091676A
Other languages
Japanese (ja)
Inventor
Masashi Yamamoto
Takashi Naganuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15091676A priority Critical patent/JPS5375853A/en
Publication of JPS5375853A publication Critical patent/JPS5375853A/en
Pending legal-status Critical Current

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  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To measure the specific resistance of an epitaxially grown layer at high accuracy by applying annealing treatment.
COPYRIGHT: (C)1978,JPO&Japio
JP15091676A 1976-12-17 1976-12-17 Measuring method for specific resistance Pending JPS5375853A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15091676A JPS5375853A (en) 1976-12-17 1976-12-17 Measuring method for specific resistance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15091676A JPS5375853A (en) 1976-12-17 1976-12-17 Measuring method for specific resistance

Publications (1)

Publication Number Publication Date
JPS5375853A true JPS5375853A (en) 1978-07-05

Family

ID=15507189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15091676A Pending JPS5375853A (en) 1976-12-17 1976-12-17 Measuring method for specific resistance

Country Status (1)

Country Link
JP (1) JPS5375853A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0634790A2 (en) * 1993-07-16 1995-01-18 Shin-Etsu Handotai Company Limited Method for determination of resistivity of N-Type silicon Epitaxial layer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0634790A2 (en) * 1993-07-16 1995-01-18 Shin-Etsu Handotai Company Limited Method for determination of resistivity of N-Type silicon Epitaxial layer
EP0634790A3 (en) * 1993-07-16 1995-12-13 Shinetsu Handotai Kk Method for determination of resistivity of N-Type silicon Epitaxial layer.

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