JPS5375853A - Measuring method for specific resistance - Google Patents
Measuring method for specific resistanceInfo
- Publication number
- JPS5375853A JPS5375853A JP15091676A JP15091676A JPS5375853A JP S5375853 A JPS5375853 A JP S5375853A JP 15091676 A JP15091676 A JP 15091676A JP 15091676 A JP15091676 A JP 15091676A JP S5375853 A JPS5375853 A JP S5375853A
- Authority
- JP
- Japan
- Prior art keywords
- specific resistance
- measuring method
- measure
- high accuracy
- epitaxially grown
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Resistance Or Impedance (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To measure the specific resistance of an epitaxially grown layer at high accuracy by applying annealing treatment.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15091676A JPS5375853A (en) | 1976-12-17 | 1976-12-17 | Measuring method for specific resistance |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15091676A JPS5375853A (en) | 1976-12-17 | 1976-12-17 | Measuring method for specific resistance |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5375853A true JPS5375853A (en) | 1978-07-05 |
Family
ID=15507189
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15091676A Pending JPS5375853A (en) | 1976-12-17 | 1976-12-17 | Measuring method for specific resistance |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5375853A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0634790A2 (en) * | 1993-07-16 | 1995-01-18 | Shin-Etsu Handotai Company Limited | Method for determination of resistivity of N-Type silicon Epitaxial layer |
-
1976
- 1976-12-17 JP JP15091676A patent/JPS5375853A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0634790A2 (en) * | 1993-07-16 | 1995-01-18 | Shin-Etsu Handotai Company Limited | Method for determination of resistivity of N-Type silicon Epitaxial layer |
EP0634790A3 (en) * | 1993-07-16 | 1995-12-13 | Shinetsu Handotai Kk | Method for determination of resistivity of N-Type silicon Epitaxial layer. |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS51117078A (en) | Magnetic field measuring method | |
JPS537398A (en) | Data processing apparatus | |
JPS5375853A (en) | Measuring method for specific resistance | |
JPS5258179A (en) | Apparatus for measuring diameter of hold bored | |
JPS51139221A (en) | Method of and apparatus for measuring reflesh period of mis dynamic ty pe memory | |
JPS5280859A (en) | Measuring method using interferometer | |
JPS5425786A (en) | Repeated bending tester | |
JPS5355057A (en) | Measuring apparatus of multipoint temperature | |
JPS5228872A (en) | Method for measuring the size of thin plane | |
JPS5223581A (en) | Antifreeze composition and production process for same | |
JPS52120032A (en) | Apparatus for measuring physical strength | |
JPS5244480A (en) | Improcess measuring device for non-circula material | |
JPS5280067A (en) | Measuring method for resistance of transformer windings | |
JPS523457A (en) | Measuring method of wheel diameter | |
JPS5354675A (en) | Positioning detecting method | |
JPS53122465A (en) | Magnetic flux density measuring apparatus | |
JPS5245076A (en) | Measuring method for power cable sheath loss | |
JPS53116069A (en) | Measuring method for amount of ion injection | |
JPS5430867A (en) | Temperature compensating method of shape detectors | |
JPS5225567A (en) | Semiconductor manufacturing apparatus | |
JPS5245274A (en) | Method for inspection before perfection of transistor | |
JPS52115699A (en) | Measuring method for time duty factors | |
JPS531573A (en) | Measuring device for dc magnetization characteristics | |
JPS52105880A (en) | Automatic unbalance correcting apparatus | |
JPS527651A (en) | Measurement value integration system |