JPS5280859A - Measuring method using interferometer - Google Patents
Measuring method using interferometerInfo
- Publication number
- JPS5280859A JPS5280859A JP15667975A JP15667975A JPS5280859A JP S5280859 A JPS5280859 A JP S5280859A JP 15667975 A JP15667975 A JP 15667975A JP 15667975 A JP15667975 A JP 15667975A JP S5280859 A JPS5280859 A JP S5280859A
- Authority
- JP
- Japan
- Prior art keywords
- interferometer
- measuring method
- erasing
- measurement
- reference light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To make possible the measurement of thin thickness by erasing central interference peaks by means of reference light.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15667975A JPS598762B2 (en) | 1975-12-27 | 1975-12-27 | How to use the information |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15667975A JPS598762B2 (en) | 1975-12-27 | 1975-12-27 | How to use the information |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5280859A true JPS5280859A (en) | 1977-07-06 |
JPS598762B2 JPS598762B2 (en) | 1984-02-27 |
Family
ID=15632941
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15667975A Expired JPS598762B2 (en) | 1975-12-27 | 1975-12-27 | How to use the information |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS598762B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5792834A (en) * | 1980-12-01 | 1982-06-09 | Hitachi Ltd | Evaluation of dielectric insulating isolation substrate |
JPH05248817A (en) * | 1991-12-20 | 1993-09-28 | Internatl Business Mach Corp <Ibm> | Interferometer, semiconductor processor and method and apparatus for measuring surface position of substrate |
JPH06109865A (en) * | 1992-09-26 | 1994-04-22 | Niigata Denki Kk | Method and apparatus for detecting wet state of road surface |
JP2009516171A (en) * | 2005-11-15 | 2009-04-16 | ザイゴ コーポレーション | Interferometer and method for measuring properties of optically unprocessed surface features |
-
1975
- 1975-12-27 JP JP15667975A patent/JPS598762B2/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5792834A (en) * | 1980-12-01 | 1982-06-09 | Hitachi Ltd | Evaluation of dielectric insulating isolation substrate |
JPH05248817A (en) * | 1991-12-20 | 1993-09-28 | Internatl Business Mach Corp <Ibm> | Interferometer, semiconductor processor and method and apparatus for measuring surface position of substrate |
JPH06109865A (en) * | 1992-09-26 | 1994-04-22 | Niigata Denki Kk | Method and apparatus for detecting wet state of road surface |
JP2009516171A (en) * | 2005-11-15 | 2009-04-16 | ザイゴ コーポレーション | Interferometer and method for measuring properties of optically unprocessed surface features |
KR101321861B1 (en) * | 2005-11-15 | 2013-10-25 | 지고 코포레이션 | Interferometer and method for measuring characteristics of optically unresolved surface features |
Also Published As
Publication number | Publication date |
---|---|
JPS598762B2 (en) | 1984-02-27 |
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