JPS5280859A - Measuring method using interferometer - Google Patents

Measuring method using interferometer

Info

Publication number
JPS5280859A
JPS5280859A JP15667975A JP15667975A JPS5280859A JP S5280859 A JPS5280859 A JP S5280859A JP 15667975 A JP15667975 A JP 15667975A JP 15667975 A JP15667975 A JP 15667975A JP S5280859 A JPS5280859 A JP S5280859A
Authority
JP
Japan
Prior art keywords
interferometer
measuring method
erasing
measurement
reference light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15667975A
Other languages
Japanese (ja)
Other versions
JPS598762B2 (en
Inventor
Tetsuo Kuwayama
Nobuyoshi Tanaka
Kazuya Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP15667975A priority Critical patent/JPS598762B2/en
Publication of JPS5280859A publication Critical patent/JPS5280859A/en
Publication of JPS598762B2 publication Critical patent/JPS598762B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To make possible the measurement of thin thickness by erasing central interference peaks by means of reference light.
COPYRIGHT: (C)1977,JPO&Japio
JP15667975A 1975-12-27 1975-12-27 How to use the information Expired JPS598762B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15667975A JPS598762B2 (en) 1975-12-27 1975-12-27 How to use the information

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15667975A JPS598762B2 (en) 1975-12-27 1975-12-27 How to use the information

Publications (2)

Publication Number Publication Date
JPS5280859A true JPS5280859A (en) 1977-07-06
JPS598762B2 JPS598762B2 (en) 1984-02-27

Family

ID=15632941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15667975A Expired JPS598762B2 (en) 1975-12-27 1975-12-27 How to use the information

Country Status (1)

Country Link
JP (1) JPS598762B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5792834A (en) * 1980-12-01 1982-06-09 Hitachi Ltd Evaluation of dielectric insulating isolation substrate
JPH05248817A (en) * 1991-12-20 1993-09-28 Internatl Business Mach Corp <Ibm> Interferometer, semiconductor processor and method and apparatus for measuring surface position of substrate
JPH06109865A (en) * 1992-09-26 1994-04-22 Niigata Denki Kk Method and apparatus for detecting wet state of road surface
JP2009516171A (en) * 2005-11-15 2009-04-16 ザイゴ コーポレーション Interferometer and method for measuring properties of optically unprocessed surface features

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5792834A (en) * 1980-12-01 1982-06-09 Hitachi Ltd Evaluation of dielectric insulating isolation substrate
JPH05248817A (en) * 1991-12-20 1993-09-28 Internatl Business Mach Corp <Ibm> Interferometer, semiconductor processor and method and apparatus for measuring surface position of substrate
JPH06109865A (en) * 1992-09-26 1994-04-22 Niigata Denki Kk Method and apparatus for detecting wet state of road surface
JP2009516171A (en) * 2005-11-15 2009-04-16 ザイゴ コーポレーション Interferometer and method for measuring properties of optically unprocessed surface features
KR101321861B1 (en) * 2005-11-15 2013-10-25 지고 코포레이션 Interferometer and method for measuring characteristics of optically unresolved surface features

Also Published As

Publication number Publication date
JPS598762B2 (en) 1984-02-27

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