JPS5421265A - Forming method of semiconductor oxide film - Google Patents
Forming method of semiconductor oxide filmInfo
- Publication number
- JPS5421265A JPS5421265A JP8680577A JP8680577A JPS5421265A JP S5421265 A JPS5421265 A JP S5421265A JP 8680577 A JP8680577 A JP 8680577A JP 8680577 A JP8680577 A JP 8680577A JP S5421265 A JPS5421265 A JP S5421265A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- forming method
- semiconductor oxide
- oxidation
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To decrease defective layer caused on the substrate, by dividing the thermal oxidation into two times and by performing the oxidation with a temperature at the second greater at least by 50°C than the first oxidation temperature, in forming oxide film on a semiconductor substrate.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8680577A JPS5421265A (en) | 1977-07-19 | 1977-07-19 | Forming method of semiconductor oxide film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8680577A JPS5421265A (en) | 1977-07-19 | 1977-07-19 | Forming method of semiconductor oxide film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5421265A true JPS5421265A (en) | 1979-02-17 |
JPS6151416B2 JPS6151416B2 (en) | 1986-11-08 |
Family
ID=13897007
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8680577A Granted JPS5421265A (en) | 1977-07-19 | 1977-07-19 | Forming method of semiconductor oxide film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5421265A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55140234A (en) * | 1979-04-19 | 1980-11-01 | Nec Kyushu Ltd | Method of forming oxide film by heating |
JPS591003U (en) * | 1982-06-28 | 1984-01-06 | 株式会社町田製作所 | Light guide path for laser |
JPS59154404A (en) * | 1983-02-21 | 1984-09-03 | Furukawa Electric Co Ltd:The | Pipe covered optical fiber and its terminal processing method |
JPS59227128A (en) * | 1983-06-08 | 1984-12-20 | Hitachi Ltd | Oxidation method for semiconductor substrate |
JPS60124882A (en) * | 1983-12-09 | 1985-07-03 | Agency Of Ind Science & Technol | Manufacture of solar cell |
JPS60201309A (en) * | 1984-03-26 | 1985-10-11 | Sumitomo Electric Ind Ltd | Optical fiber core |
JPS60205517A (en) * | 1984-03-30 | 1985-10-17 | Fujikura Ltd | Optical fiber core and its production |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50150373A (en) * | 1974-05-22 | 1975-12-02 |
-
1977
- 1977-07-19 JP JP8680577A patent/JPS5421265A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50150373A (en) * | 1974-05-22 | 1975-12-02 |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55140234A (en) * | 1979-04-19 | 1980-11-01 | Nec Kyushu Ltd | Method of forming oxide film by heating |
JPS6210018B2 (en) * | 1979-04-19 | 1987-03-04 | Kyushu Nippon Electric | |
JPS591003U (en) * | 1982-06-28 | 1984-01-06 | 株式会社町田製作所 | Light guide path for laser |
JPS59154404A (en) * | 1983-02-21 | 1984-09-03 | Furukawa Electric Co Ltd:The | Pipe covered optical fiber and its terminal processing method |
JPS59227128A (en) * | 1983-06-08 | 1984-12-20 | Hitachi Ltd | Oxidation method for semiconductor substrate |
JPH0223023B2 (en) * | 1983-06-08 | 1990-05-22 | Hitachi Ltd | |
JPS60124882A (en) * | 1983-12-09 | 1985-07-03 | Agency Of Ind Science & Technol | Manufacture of solar cell |
JPH0515070B2 (en) * | 1983-12-09 | 1993-02-26 | Kogyo Gijutsuin | |
JPS60201309A (en) * | 1984-03-26 | 1985-10-11 | Sumitomo Electric Ind Ltd | Optical fiber core |
JPS60205517A (en) * | 1984-03-30 | 1985-10-17 | Fujikura Ltd | Optical fiber core and its production |
Also Published As
Publication number | Publication date |
---|---|
JPS6151416B2 (en) | 1986-11-08 |
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