JPS52146698A - Combustible gas detecting element - Google Patents

Combustible gas detecting element

Info

Publication number
JPS52146698A
JPS52146698A JP6384276A JP6384276A JPS52146698A JP S52146698 A JPS52146698 A JP S52146698A JP 6384276 A JP6384276 A JP 6384276A JP 6384276 A JP6384276 A JP 6384276A JP S52146698 A JPS52146698 A JP S52146698A
Authority
JP
Japan
Prior art keywords
detecting element
combustible gas
gas detecting
type
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6384276A
Other languages
Japanese (ja)
Inventor
Shugo Endo
Shigeo Akiyama
Jun Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP6384276A priority Critical patent/JPS52146698A/en
Publication of JPS52146698A publication Critical patent/JPS52146698A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To favorably form the bridge and to make easy the same temperature condition, by sputtering N type and P type semiconductor on the same substrate in thin film.
COPYRIGHT: (C)1977,JPO&Japio
JP6384276A 1976-05-31 1976-05-31 Combustible gas detecting element Pending JPS52146698A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6384276A JPS52146698A (en) 1976-05-31 1976-05-31 Combustible gas detecting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6384276A JPS52146698A (en) 1976-05-31 1976-05-31 Combustible gas detecting element

Publications (1)

Publication Number Publication Date
JPS52146698A true JPS52146698A (en) 1977-12-06

Family

ID=13240980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6384276A Pending JPS52146698A (en) 1976-05-31 1976-05-31 Combustible gas detecting element

Country Status (1)

Country Link
JP (1) JPS52146698A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58194468A (en) * 1982-05-07 1983-11-12 Hitachi Ltd Checking method of picture quality
JPH0288957A (en) * 1988-09-27 1990-03-29 Nohmi Bosai Ltd Gas sensitive thin-film element and production thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58194468A (en) * 1982-05-07 1983-11-12 Hitachi Ltd Checking method of picture quality
JPH0288957A (en) * 1988-09-27 1990-03-29 Nohmi Bosai Ltd Gas sensitive thin-film element and production thereof

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