JPS52146698A - Combustible gas detecting element - Google Patents
Combustible gas detecting elementInfo
- Publication number
- JPS52146698A JPS52146698A JP6384276A JP6384276A JPS52146698A JP S52146698 A JPS52146698 A JP S52146698A JP 6384276 A JP6384276 A JP 6384276A JP 6384276 A JP6384276 A JP 6384276A JP S52146698 A JPS52146698 A JP S52146698A
- Authority
- JP
- Japan
- Prior art keywords
- detecting element
- combustible gas
- gas detecting
- type
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To favorably form the bridge and to make easy the same temperature condition, by sputtering N type and P type semiconductor on the same substrate in thin film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6384276A JPS52146698A (en) | 1976-05-31 | 1976-05-31 | Combustible gas detecting element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6384276A JPS52146698A (en) | 1976-05-31 | 1976-05-31 | Combustible gas detecting element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52146698A true JPS52146698A (en) | 1977-12-06 |
Family
ID=13240980
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6384276A Pending JPS52146698A (en) | 1976-05-31 | 1976-05-31 | Combustible gas detecting element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52146698A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58194468A (en) * | 1982-05-07 | 1983-11-12 | Hitachi Ltd | Checking method of picture quality |
JPH0288957A (en) * | 1988-09-27 | 1990-03-29 | Nohmi Bosai Ltd | Gas sensitive thin-film element and production thereof |
-
1976
- 1976-05-31 JP JP6384276A patent/JPS52146698A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58194468A (en) * | 1982-05-07 | 1983-11-12 | Hitachi Ltd | Checking method of picture quality |
JPH0288957A (en) * | 1988-09-27 | 1990-03-29 | Nohmi Bosai Ltd | Gas sensitive thin-film element and production thereof |
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