JPS5367498A - Gas detector - Google Patents

Gas detector

Info

Publication number
JPS5367498A
JPS5367498A JP14222276A JP14222276A JPS5367498A JP S5367498 A JPS5367498 A JP S5367498A JP 14222276 A JP14222276 A JP 14222276A JP 14222276 A JP14222276 A JP 14222276A JP S5367498 A JPS5367498 A JP S5367498A
Authority
JP
Japan
Prior art keywords
gas detector
forming
film
respose
ability
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14222276A
Other languages
Japanese (ja)
Inventor
Hitoshi Minorikawa
Sadayasu Ueno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14222276A priority Critical patent/JPS5367498A/en
Publication of JPS5367498A publication Critical patent/JPS5367498A/en
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE: To obtain high speed respose ability, by forming heating element on the surface of insulating substrate and also forming the film of gas sensitive substance on the above surface through insulating film.
COPYRIGHT: (C)1978,JPO&Japio
JP14222276A 1976-11-29 1976-11-29 Gas detector Pending JPS5367498A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14222276A JPS5367498A (en) 1976-11-29 1976-11-29 Gas detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14222276A JPS5367498A (en) 1976-11-29 1976-11-29 Gas detector

Publications (1)

Publication Number Publication Date
JPS5367498A true JPS5367498A (en) 1978-06-15

Family

ID=15310244

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14222276A Pending JPS5367498A (en) 1976-11-29 1976-11-29 Gas detector

Country Status (1)

Country Link
JP (1) JPS5367498A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57104357U (en) * 1980-12-18 1982-06-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57104357U (en) * 1980-12-18 1982-06-26

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