JPS54871A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS54871A
JPS54871A JP6545677A JP6545677A JPS54871A JP S54871 A JPS54871 A JP S54871A JP 6545677 A JP6545677 A JP 6545677A JP 6545677 A JP6545677 A JP 6545677A JP S54871 A JPS54871 A JP S54871A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
film
fusing
giving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6545677A
Other languages
Japanese (ja)
Inventor
Atsushi Nakano
Michinori Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6545677A priority Critical patent/JPS54871A/en
Publication of JPS54871A publication Critical patent/JPS54871A/en
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To form a good-quality protective film in a low temperature without giving any effect to the element on the substrate, by forming G-PSG film containing oxide Ge and then heating and fusing the film in the vapor or H2.
COPYRIGHT: (C)1979,JPO&Japio
JP6545677A 1977-06-03 1977-06-03 Manufacture of semiconductor device Pending JPS54871A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6545677A JPS54871A (en) 1977-06-03 1977-06-03 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6545677A JPS54871A (en) 1977-06-03 1977-06-03 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS54871A true JPS54871A (en) 1979-01-06

Family

ID=13287646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6545677A Pending JPS54871A (en) 1977-06-03 1977-06-03 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS54871A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62239548A (en) * 1986-04-10 1987-10-20 Seiko Epson Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62239548A (en) * 1986-04-10 1987-10-20 Seiko Epson Corp Manufacture of semiconductor device

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