JPS5373973A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS5373973A JPS5373973A JP15049676A JP15049676A JPS5373973A JP S5373973 A JPS5373973 A JP S5373973A JP 15049676 A JP15049676 A JP 15049676A JP 15049676 A JP15049676 A JP 15049676A JP S5373973 A JPS5373973 A JP S5373973A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- opening
- oxided
- determing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To perform extremely fine opening, by opening through the utilization of the domain oxided at the side of the semiconductor layer and by providing the oxide film with a good controllability by determing temperature and time.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15049676A JPS5373973A (en) | 1976-12-14 | 1976-12-14 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15049676A JPS5373973A (en) | 1976-12-14 | 1976-12-14 | Manufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5373973A true JPS5373973A (en) | 1978-06-30 |
Family
ID=15498126
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15049676A Pending JPS5373973A (en) | 1976-12-14 | 1976-12-14 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5373973A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58107637A (en) * | 1981-12-10 | 1983-06-27 | エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン | Method of forming fine groove on substrate region and device with such substrate region |
-
1976
- 1976-12-14 JP JP15049676A patent/JPS5373973A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58107637A (en) * | 1981-12-10 | 1983-06-27 | エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン | Method of forming fine groove on substrate region and device with such substrate region |
JPH059939B2 (en) * | 1981-12-10 | 1993-02-08 | Fuiritsupusu Furuuiranpenfuaburiken Nv |
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