JPS5373973A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5373973A
JPS5373973A JP15049676A JP15049676A JPS5373973A JP S5373973 A JPS5373973 A JP S5373973A JP 15049676 A JP15049676 A JP 15049676A JP 15049676 A JP15049676 A JP 15049676A JP S5373973 A JPS5373973 A JP S5373973A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
opening
oxided
determing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15049676A
Other languages
Japanese (ja)
Inventor
Takashi Hirao
Shigetoshi Takayanagi
Kaoru Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP15049676A priority Critical patent/JPS5373973A/en
Publication of JPS5373973A publication Critical patent/JPS5373973A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To perform extremely fine opening, by opening through the utilization of the domain oxided at the side of the semiconductor layer and by providing the oxide film with a good controllability by determing temperature and time.
COPYRIGHT: (C)1978,JPO&Japio
JP15049676A 1976-12-14 1976-12-14 Manufacture for semiconductor device Pending JPS5373973A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15049676A JPS5373973A (en) 1976-12-14 1976-12-14 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15049676A JPS5373973A (en) 1976-12-14 1976-12-14 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5373973A true JPS5373973A (en) 1978-06-30

Family

ID=15498126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15049676A Pending JPS5373973A (en) 1976-12-14 1976-12-14 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5373973A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58107637A (en) * 1981-12-10 1983-06-27 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン Method of forming fine groove on substrate region and device with such substrate region

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58107637A (en) * 1981-12-10 1983-06-27 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン Method of forming fine groove on substrate region and device with such substrate region
JPH059939B2 (en) * 1981-12-10 1993-02-08 Fuiritsupusu Furuuiranpenfuaburiken Nv

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