JPS5228377A - Temperature distribution measuring device - Google Patents

Temperature distribution measuring device

Info

Publication number
JPS5228377A
JPS5228377A JP10399475A JP10399475A JPS5228377A JP S5228377 A JPS5228377 A JP S5228377A JP 10399475 A JP10399475 A JP 10399475A JP 10399475 A JP10399475 A JP 10399475A JP S5228377 A JPS5228377 A JP S5228377A
Authority
JP
Japan
Prior art keywords
temperature distribution
measuring device
distribution measuring
metal layer
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10399475A
Other languages
Japanese (ja)
Inventor
Hideo Enari
Naoyuki Nagashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10399475A priority Critical patent/JPS5228377A/en
Publication of JPS5228377A publication Critical patent/JPS5228377A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To provide a first metal layer on a substrate and selectively provide a second metal layer thereon thereby making possible the accurate measurement of temperature distribution and extremely easy handling.
COPYRIGHT: (C)1977,JPO&Japio
JP10399475A 1975-08-29 1975-08-29 Temperature distribution measuring device Pending JPS5228377A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10399475A JPS5228377A (en) 1975-08-29 1975-08-29 Temperature distribution measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10399475A JPS5228377A (en) 1975-08-29 1975-08-29 Temperature distribution measuring device

Publications (1)

Publication Number Publication Date
JPS5228377A true JPS5228377A (en) 1977-03-03

Family

ID=14368839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10399475A Pending JPS5228377A (en) 1975-08-29 1975-08-29 Temperature distribution measuring device

Country Status (1)

Country Link
JP (1) JPS5228377A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57151534U (en) * 1981-03-18 1982-09-22
JPS5826632U (en) * 1981-08-11 1983-02-21

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57151534U (en) * 1981-03-18 1982-09-22
JPS5826632U (en) * 1981-08-11 1983-02-21

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