JPS5317064A - Impurity diffusion method - Google Patents
Impurity diffusion methodInfo
- Publication number
- JPS5317064A JPS5317064A JP9111276A JP9111276A JPS5317064A JP S5317064 A JPS5317064 A JP S5317064A JP 9111276 A JP9111276 A JP 9111276A JP 9111276 A JP9111276 A JP 9111276A JP S5317064 A JPS5317064 A JP S5317064A
- Authority
- JP
- Japan
- Prior art keywords
- impurity diffusion
- diffusion method
- wafers
- windward
- spacings
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To reduce the variations in the layer resistance of wafers by making the spacings between BN plates and wafers shorter on the windward and longer on the lee and performing diffusion.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9111276A JPS5317064A (en) | 1976-07-30 | 1976-07-30 | Impurity diffusion method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9111276A JPS5317064A (en) | 1976-07-30 | 1976-07-30 | Impurity diffusion method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5317064A true JPS5317064A (en) | 1978-02-16 |
Family
ID=14017424
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9111276A Pending JPS5317064A (en) | 1976-07-30 | 1976-07-30 | Impurity diffusion method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5317064A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009143508A (en) * | 2007-12-18 | 2009-07-02 | Honda Motor Co Ltd | Throttle device for vehicle |
-
1976
- 1976-07-30 JP JP9111276A patent/JPS5317064A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009143508A (en) * | 2007-12-18 | 2009-07-02 | Honda Motor Co Ltd | Throttle device for vehicle |
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