JPS53133366A - Impurity diffusion method - Google Patents

Impurity diffusion method

Info

Publication number
JPS53133366A
JPS53133366A JP4921777A JP4921777A JPS53133366A JP S53133366 A JPS53133366 A JP S53133366A JP 4921777 A JP4921777 A JP 4921777A JP 4921777 A JP4921777 A JP 4921777A JP S53133366 A JPS53133366 A JP S53133366A
Authority
JP
Japan
Prior art keywords
impurity diffusion
diffusion method
diffusion
tilting
vertical direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4921777A
Other languages
Japanese (ja)
Inventor
Sokichi Yamagishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP4921777A priority Critical patent/JPS53133366A/en
Publication of JPS53133366A publication Critical patent/JPS53133366A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a uniform resistance diffusion layer over the entire boat by setting up the plate-type diffusion source and the semiconductor wafer in parallel and with a fixed space and then tilting them in the vertical direction to carry out a diffusion.
COPYRIGHT: (C)1978,JPO&Japio
JP4921777A 1977-04-27 1977-04-27 Impurity diffusion method Pending JPS53133366A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4921777A JPS53133366A (en) 1977-04-27 1977-04-27 Impurity diffusion method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4921777A JPS53133366A (en) 1977-04-27 1977-04-27 Impurity diffusion method

Publications (1)

Publication Number Publication Date
JPS53133366A true JPS53133366A (en) 1978-11-21

Family

ID=12824774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4921777A Pending JPS53133366A (en) 1977-04-27 1977-04-27 Impurity diffusion method

Country Status (1)

Country Link
JP (1) JPS53133366A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737826A (en) * 1980-08-16 1982-03-02 Heraeus Schott Quarzschmelze Carrier enclosure for semiconductor disc
JPS59134817A (en) * 1983-01-21 1984-08-02 Hitachi Ltd Case for containing jig
JPH04321221A (en) * 1991-04-20 1992-11-11 Komatsu Electron Metals Co Ltd Diffusion of semiconductor wafer

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737826A (en) * 1980-08-16 1982-03-02 Heraeus Schott Quarzschmelze Carrier enclosure for semiconductor disc
JPS6141128B2 (en) * 1980-08-16 1986-09-12 Hereusu Kuarutsushumerutsue Gmbh
JPS59134817A (en) * 1983-01-21 1984-08-02 Hitachi Ltd Case for containing jig
JPH04321221A (en) * 1991-04-20 1992-11-11 Komatsu Electron Metals Co Ltd Diffusion of semiconductor wafer

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