JPS53133366A - Impurity diffusion method - Google Patents
Impurity diffusion methodInfo
- Publication number
- JPS53133366A JPS53133366A JP4921777A JP4921777A JPS53133366A JP S53133366 A JPS53133366 A JP S53133366A JP 4921777 A JP4921777 A JP 4921777A JP 4921777 A JP4921777 A JP 4921777A JP S53133366 A JPS53133366 A JP S53133366A
- Authority
- JP
- Japan
- Prior art keywords
- impurity diffusion
- diffusion method
- diffusion
- tilting
- vertical direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain a uniform resistance diffusion layer over the entire boat by setting up the plate-type diffusion source and the semiconductor wafer in parallel and with a fixed space and then tilting them in the vertical direction to carry out a diffusion.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4921777A JPS53133366A (en) | 1977-04-27 | 1977-04-27 | Impurity diffusion method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4921777A JPS53133366A (en) | 1977-04-27 | 1977-04-27 | Impurity diffusion method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53133366A true JPS53133366A (en) | 1978-11-21 |
Family
ID=12824774
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4921777A Pending JPS53133366A (en) | 1977-04-27 | 1977-04-27 | Impurity diffusion method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53133366A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5737826A (en) * | 1980-08-16 | 1982-03-02 | Heraeus Schott Quarzschmelze | Carrier enclosure for semiconductor disc |
JPS59134817A (en) * | 1983-01-21 | 1984-08-02 | Hitachi Ltd | Case for containing jig |
JPH04321221A (en) * | 1991-04-20 | 1992-11-11 | Komatsu Electron Metals Co Ltd | Diffusion of semiconductor wafer |
-
1977
- 1977-04-27 JP JP4921777A patent/JPS53133366A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5737826A (en) * | 1980-08-16 | 1982-03-02 | Heraeus Schott Quarzschmelze | Carrier enclosure for semiconductor disc |
JPS6141128B2 (en) * | 1980-08-16 | 1986-09-12 | Hereusu Kuarutsushumerutsue Gmbh | |
JPS59134817A (en) * | 1983-01-21 | 1984-08-02 | Hitachi Ltd | Case for containing jig |
JPH04321221A (en) * | 1991-04-20 | 1992-11-11 | Komatsu Electron Metals Co Ltd | Diffusion of semiconductor wafer |
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