JPS53108764A - Diffusion jig of semiconductor wafers - Google Patents
Diffusion jig of semiconductor wafersInfo
- Publication number
- JPS53108764A JPS53108764A JP2360477A JP2360477A JPS53108764A JP S53108764 A JPS53108764 A JP S53108764A JP 2360477 A JP2360477 A JP 2360477A JP 2360477 A JP2360477 A JP 2360477A JP S53108764 A JPS53108764 A JP S53108764A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- jig
- wafers
- diffusion jig
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To reduce the heat capacity of a jig and reduce the change in crystals owing to temperature difference within wafers by forming the diffusion jig for placement of semiconductor wafers by hollow bar-form heat-resistant and corrosion-resistant materials provided with grooves for supporting wafers.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2360477A JPS53108764A (en) | 1977-03-04 | 1977-03-04 | Diffusion jig of semiconductor wafers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2360477A JPS53108764A (en) | 1977-03-04 | 1977-03-04 | Diffusion jig of semiconductor wafers |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53108764A true JPS53108764A (en) | 1978-09-21 |
Family
ID=12115198
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2360477A Pending JPS53108764A (en) | 1977-03-04 | 1977-03-04 | Diffusion jig of semiconductor wafers |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53108764A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6398123A (en) * | 1986-10-15 | 1988-04-28 | Tokai Kounetsu Kogyo Kk | Manufacture of wafer boat for manufacturing semiconductor |
JPH01259528A (en) * | 1988-04-08 | 1989-10-17 | Hitachi Ltd | Wafer supporting device for semiconductor wafer heat-treating apparatus, and semiconductor wafer heat-treating apparatus |
JPH04192517A (en) * | 1990-11-27 | 1992-07-10 | Nec Yamagata Ltd | Semiconductor manufacturing apparatus |
-
1977
- 1977-03-04 JP JP2360477A patent/JPS53108764A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6398123A (en) * | 1986-10-15 | 1988-04-28 | Tokai Kounetsu Kogyo Kk | Manufacture of wafer boat for manufacturing semiconductor |
JPH0770494B2 (en) * | 1986-10-15 | 1995-07-31 | 東海高熱工業株式会社 | Wafer boat manufacturing method for semiconductor manufacturing |
JPH01259528A (en) * | 1988-04-08 | 1989-10-17 | Hitachi Ltd | Wafer supporting device for semiconductor wafer heat-treating apparatus, and semiconductor wafer heat-treating apparatus |
JPH04192517A (en) * | 1990-11-27 | 1992-07-10 | Nec Yamagata Ltd | Semiconductor manufacturing apparatus |
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