JPS54134553A - Wafer holding tool - Google Patents
Wafer holding toolInfo
- Publication number
- JPS54134553A JPS54134553A JP4294378A JP4294378A JPS54134553A JP S54134553 A JPS54134553 A JP S54134553A JP 4294378 A JP4294378 A JP 4294378A JP 4294378 A JP4294378 A JP 4294378A JP S54134553 A JPS54134553 A JP S54134553A
- Authority
- JP
- Japan
- Prior art keywords
- holding tool
- wafers
- wafer holding
- wafer
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To obtain a wafer holding tool by which a large amount of wafers can be handled easily.
CONSTITUTION: Internal holding tool 7 having plural grooves 7a, which are arranged at every prescribed interval on the upper face and where wafers 1 are put on and supported respectively, and stopping part 7b, which is provided partially at least, and consisting of materials, which can be processed by heat treatment and liquid together with wafer 1, and external frame body 3 having plural grooves 3b, which guide wafers 1, and the holding part, where stopping part 7b is stopped and internal holding tool 7 is fixed and held, in the inside wall and consisting of materials, which can be processed by liquid, are provided.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4294378A JPS54134553A (en) | 1978-04-11 | 1978-04-11 | Wafer holding tool |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4294378A JPS54134553A (en) | 1978-04-11 | 1978-04-11 | Wafer holding tool |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54134553A true JPS54134553A (en) | 1979-10-19 |
JPS5526612B2 JPS5526612B2 (en) | 1980-07-15 |
Family
ID=12650086
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4294378A Granted JPS54134553A (en) | 1978-04-11 | 1978-04-11 | Wafer holding tool |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54134553A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4515104A (en) * | 1983-05-13 | 1985-05-07 | Asq Boats, Inc. | Contiguous wafer boat |
US4572101A (en) * | 1983-05-13 | 1986-02-25 | Asq Boats, Inc. | Side lifting wafer boat assembly |
JPH07300136A (en) * | 1983-08-17 | 1995-11-14 | Empak Inc | Box for memory disk |
US6814808B1 (en) | 2002-10-08 | 2004-11-09 | Sci-Tech Glassblowing, Inc. | Carrier for semiconductor wafers |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5285477A (en) * | 1976-01-09 | 1977-07-15 | Senken Kk | Wafer carrying container for integrated circuit |
-
1978
- 1978-04-11 JP JP4294378A patent/JPS54134553A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5285477A (en) * | 1976-01-09 | 1977-07-15 | Senken Kk | Wafer carrying container for integrated circuit |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4515104A (en) * | 1983-05-13 | 1985-05-07 | Asq Boats, Inc. | Contiguous wafer boat |
US4572101A (en) * | 1983-05-13 | 1986-02-25 | Asq Boats, Inc. | Side lifting wafer boat assembly |
JPH07300136A (en) * | 1983-08-17 | 1995-11-14 | Empak Inc | Box for memory disk |
US6814808B1 (en) | 2002-10-08 | 2004-11-09 | Sci-Tech Glassblowing, Inc. | Carrier for semiconductor wafers |
Also Published As
Publication number | Publication date |
---|---|
JPS5526612B2 (en) | 1980-07-15 |
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