JPS54134553A - Wafer holding tool - Google Patents

Wafer holding tool

Info

Publication number
JPS54134553A
JPS54134553A JP4294378A JP4294378A JPS54134553A JP S54134553 A JPS54134553 A JP S54134553A JP 4294378 A JP4294378 A JP 4294378A JP 4294378 A JP4294378 A JP 4294378A JP S54134553 A JPS54134553 A JP S54134553A
Authority
JP
Japan
Prior art keywords
holding tool
wafers
wafer holding
wafer
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4294378A
Other languages
Japanese (ja)
Other versions
JPS5526612B2 (en
Inventor
Masaaki Sadamori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4294378A priority Critical patent/JPS54134553A/en
Publication of JPS54134553A publication Critical patent/JPS54134553A/en
Publication of JPS5526612B2 publication Critical patent/JPS5526612B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a wafer holding tool by which a large amount of wafers can be handled easily.
CONSTITUTION: Internal holding tool 7 having plural grooves 7a, which are arranged at every prescribed interval on the upper face and where wafers 1 are put on and supported respectively, and stopping part 7b, which is provided partially at least, and consisting of materials, which can be processed by heat treatment and liquid together with wafer 1, and external frame body 3 having plural grooves 3b, which guide wafers 1, and the holding part, where stopping part 7b is stopped and internal holding tool 7 is fixed and held, in the inside wall and consisting of materials, which can be processed by liquid, are provided.
COPYRIGHT: (C)1979,JPO&Japio
JP4294378A 1978-04-11 1978-04-11 Wafer holding tool Granted JPS54134553A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4294378A JPS54134553A (en) 1978-04-11 1978-04-11 Wafer holding tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4294378A JPS54134553A (en) 1978-04-11 1978-04-11 Wafer holding tool

Publications (2)

Publication Number Publication Date
JPS54134553A true JPS54134553A (en) 1979-10-19
JPS5526612B2 JPS5526612B2 (en) 1980-07-15

Family

ID=12650086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4294378A Granted JPS54134553A (en) 1978-04-11 1978-04-11 Wafer holding tool

Country Status (1)

Country Link
JP (1) JPS54134553A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4515104A (en) * 1983-05-13 1985-05-07 Asq Boats, Inc. Contiguous wafer boat
US4572101A (en) * 1983-05-13 1986-02-25 Asq Boats, Inc. Side lifting wafer boat assembly
JPH07300136A (en) * 1983-08-17 1995-11-14 Empak Inc Box for memory disk
US6814808B1 (en) 2002-10-08 2004-11-09 Sci-Tech Glassblowing, Inc. Carrier for semiconductor wafers

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5285477A (en) * 1976-01-09 1977-07-15 Senken Kk Wafer carrying container for integrated circuit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5285477A (en) * 1976-01-09 1977-07-15 Senken Kk Wafer carrying container for integrated circuit

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4515104A (en) * 1983-05-13 1985-05-07 Asq Boats, Inc. Contiguous wafer boat
US4572101A (en) * 1983-05-13 1986-02-25 Asq Boats, Inc. Side lifting wafer boat assembly
JPH07300136A (en) * 1983-08-17 1995-11-14 Empak Inc Box for memory disk
US6814808B1 (en) 2002-10-08 2004-11-09 Sci-Tech Glassblowing, Inc. Carrier for semiconductor wafers

Also Published As

Publication number Publication date
JPS5526612B2 (en) 1980-07-15

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