JPS5285476A - Semiconductor wafer accommodating jig - Google Patents

Semiconductor wafer accommodating jig

Info

Publication number
JPS5285476A
JPS5285476A JP157576A JP157576A JPS5285476A JP S5285476 A JPS5285476 A JP S5285476A JP 157576 A JP157576 A JP 157576A JP 157576 A JP157576 A JP 157576A JP S5285476 A JPS5285476 A JP S5285476A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer accommodating
accommodating jig
jig
heat treating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP157576A
Other languages
Japanese (ja)
Inventor
Seiichi Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP157576A priority Critical patent/JPS5285476A/en
Publication of JPS5285476A publication Critical patent/JPS5285476A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a wafer vessel which may be used commonly in operations such as heat treating, etching and cleaning and which does not cause thermal deformation in heat treating.
COPYRIGHT: (C)1977,JPO&Japio
JP157576A 1976-01-09 1976-01-09 Semiconductor wafer accommodating jig Pending JPS5285476A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP157576A JPS5285476A (en) 1976-01-09 1976-01-09 Semiconductor wafer accommodating jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP157576A JPS5285476A (en) 1976-01-09 1976-01-09 Semiconductor wafer accommodating jig

Publications (1)

Publication Number Publication Date
JPS5285476A true JPS5285476A (en) 1977-07-15

Family

ID=11505306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP157576A Pending JPS5285476A (en) 1976-01-09 1976-01-09 Semiconductor wafer accommodating jig

Country Status (1)

Country Link
JP (1) JPS5285476A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56134732A (en) * 1980-03-26 1981-10-21 Hitachi Ltd Electric charge preventing jig
EP0056326A2 (en) * 1981-01-14 1982-07-21 Northern Telecom Limited Coating of semiconductor wafers and apparatus therefor
JPS62254422A (en) * 1986-04-28 1987-11-06 Fukui Shinetsu Sekiei:Kk Wafer supporting boat
JPS6343423U (en) * 1986-09-05 1988-03-23
JPH02161745A (en) * 1988-12-14 1990-06-21 Nec Corp Carrier for semiconductor wafer
JPH02225214A (en) * 1989-02-28 1990-09-07 Tokyo Electron Ltd Load/unload device
WO2004095545A3 (en) * 2003-03-28 2005-05-12 Saint Gobain Ceramics Wafer carrier having improved processing characteristics
GB2554286A (en) * 2015-05-20 2018-03-28 Nec Corp State assessment device, state assessment method, and program recording medium

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5056148A (en) * 1973-09-14 1975-05-16
JPS5067558A (en) * 1973-10-15 1975-06-06

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5056148A (en) * 1973-09-14 1975-05-16
JPS5067558A (en) * 1973-10-15 1975-06-06

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56134732A (en) * 1980-03-26 1981-10-21 Hitachi Ltd Electric charge preventing jig
EP0056326A2 (en) * 1981-01-14 1982-07-21 Northern Telecom Limited Coating of semiconductor wafers and apparatus therefor
US4466381A (en) * 1981-01-14 1984-08-21 Northern Telecom Limited Coating of semiconductor wafers and apparatus therefor
JPS62254422A (en) * 1986-04-28 1987-11-06 Fukui Shinetsu Sekiei:Kk Wafer supporting boat
JPS6343423U (en) * 1986-09-05 1988-03-23
JPH02161745A (en) * 1988-12-14 1990-06-21 Nec Corp Carrier for semiconductor wafer
JPH02225214A (en) * 1989-02-28 1990-09-07 Tokyo Electron Ltd Load/unload device
WO2004095545A3 (en) * 2003-03-28 2005-05-12 Saint Gobain Ceramics Wafer carrier having improved processing characteristics
GB2554286A (en) * 2015-05-20 2018-03-28 Nec Corp State assessment device, state assessment method, and program recording medium

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