JPS56134732A - Electric charge preventing jig - Google Patents

Electric charge preventing jig

Info

Publication number
JPS56134732A
JPS56134732A JP3744880A JP3744880A JPS56134732A JP S56134732 A JPS56134732 A JP S56134732A JP 3744880 A JP3744880 A JP 3744880A JP 3744880 A JP3744880 A JP 3744880A JP S56134732 A JPS56134732 A JP S56134732A
Authority
JP
Japan
Prior art keywords
jig
water
poly
film
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3744880A
Other languages
Japanese (ja)
Inventor
Toshihiko Takayanagi
Yoshiaki Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3744880A priority Critical patent/JPS56134732A/en
Publication of JPS56134732A publication Critical patent/JPS56134732A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/60—Protection against electrostatic charges or discharges, e.g. Faraday shields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)

Abstract

PURPOSE:To minimize deficiency in the production process preventing electrostatic attachment of dust and foreign matters to the surface of a water support jig exposed to an external atmosphere by making the surface out of a semiconductor such as a poly Si. CONSTITUTION:A jig body 2 supporting a dielectric such as a frame-shaped wafer having a slit 3 is made of quartz and a poly Si 5 is applied like a film on the external surface thereof (thickness is preferably over 50nm). A water 4 is inserted into the slit 5 of the jig thus formed to support. A static electricity generated on the surface of the water 4 with the movement of the jig 1 and contact with a fluidized gas is discharged through the poly Si film 5 being keptfrom charging the surface thereof. This prevents deficiency such as disconnection and short-circuit of the wire and pinhole of an insulating film otherwise caused by dust and foreign matters including Si piece attached on the surface of the water 4.
JP3744880A 1980-03-26 1980-03-26 Electric charge preventing jig Pending JPS56134732A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3744880A JPS56134732A (en) 1980-03-26 1980-03-26 Electric charge preventing jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3744880A JPS56134732A (en) 1980-03-26 1980-03-26 Electric charge preventing jig

Publications (1)

Publication Number Publication Date
JPS56134732A true JPS56134732A (en) 1981-10-21

Family

ID=12497774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3744880A Pending JPS56134732A (en) 1980-03-26 1980-03-26 Electric charge preventing jig

Country Status (1)

Country Link
JP (1) JPS56134732A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59202620A (en) * 1983-05-04 1984-11-16 Hitachi Ltd Heat treatment device
JPS6063941U (en) * 1983-10-07 1985-05-07 信越化学工業株式会社 Wafer handling jigs for electronic materials
JPH0312949A (en) * 1989-06-12 1991-01-21 Fujitsu Ltd Wafer carrier holding device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5285476A (en) * 1976-01-09 1977-07-15 Hitachi Ltd Semiconductor wafer accommodating jig

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5285476A (en) * 1976-01-09 1977-07-15 Hitachi Ltd Semiconductor wafer accommodating jig

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59202620A (en) * 1983-05-04 1984-11-16 Hitachi Ltd Heat treatment device
JPS6063941U (en) * 1983-10-07 1985-05-07 信越化学工業株式会社 Wafer handling jigs for electronic materials
JPH0312949A (en) * 1989-06-12 1991-01-21 Fujitsu Ltd Wafer carrier holding device

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